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EP0746022A1 Hybrid multi-chip module and method of fabricating 失效
混合 - 多芯片和Verfahren zur seiner Herstellung

Hybrid multi-chip module and method of fabricating
摘要:
A hybrid multi-chip module includes semiconductor chips (27,31) bonded to a base plate (24). The base plate includes a substrate (11) having two surfaces (12,13) and a conductive material (32) molded on the two surfaces (12,13). A coefficient of thermal expansion (CTE) mismatch between the substrate (11) and the conductive material (32) at the first surface (12) is balanced by a similar, but opposite, CTE mismatch between the substrate (11) and the conductive material (32) at the second surface (13). The CTE mismatch balance across the base plate (24) produces a base plate (24) having a substantially planar form at high temperatures.
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