发明公开
EP0770705A1 ELECTROLESS PLATING METHOD, AND METHOD AND APPARATUS FOR PRODUCING STAMPER
失效
松动的电源涂装工艺和模具的制造方法和设备
- 专利标题: ELECTROLESS PLATING METHOD, AND METHOD AND APPARATUS FOR PRODUCING STAMPER
- 专利标题(中): 松动的电源涂装工艺和模具的制造方法和设备
-
申请号: EP96907745.2申请日: 1996-04-01
-
公开(公告)号: EP0770705A1公开(公告)日: 1997-05-02
- 发明人: UEYAMA, Kenichi Kao Corporation, Research , TSURUGA, Tetsuya Kao Corporation, Research , ICHIMURA, Ikuhisa Kao Corporation, Research , OKUDA, Shinsuke Kao Corporation, Research
- 申请人: Kao Corporation
- 申请人地址: 14-10, Nihonbashi Kayabacho 1-chome Chuo-Ku Tokyo 103 JP
- 专利权人: Kao Corporation
- 当前专利权人: Kao Corporation
- 当前专利权人地址: 14-10, Nihonbashi Kayabacho 1-chome Chuo-Ku Tokyo 103 JP
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权: JP84352/95 19950410; JP167692/95 19950703; JP314031/95 19951201
- 国际公布: WO9632521 19961017
- 主分类号: C23C18/28
- IPC分类号: C23C18/28 ; C23C18/31 ; G11B7/26 ; C23C18/26
摘要:
A method and an apparatus for producing a stamper capable of producing in a high yield a stamper for producing a high quality optical disk. According to the conventional production technology of stampers, primary tin ions in a sensitizer containing the tin ions used for electric conduction treatment of a substrate surface are readily oxidized by dissolved oxygen and cause defects during the production of stampers. Therefore, even when a production apparatus is automated, substantially daily maintenance is necessary so as to keep satisfactory yield. The present invention carries out the electric conduction treatment of the substrate surface by treating the substrate surface by a treating solution containing a compound having a betaine structure and a polyoxyethylenealkylamine compound, then treating it by a colloidal solution containing tin and palladium and further conducting electroless plating. In this way, the present invention makes the maintenance work easier in an automated process and makes it possible to produce a high quality stamper with a high production yield.
信息查询
IPC分类: