公开(公告)号：EP0770705A1

公开(公告)日：1997-05-02

申请号：EP96907745.2

申请日：1996-04-01

申请人： Kao Corporation

发明人： UEYAMA, Kenichi Kao Corporation, Research ,  TSURUGA, Tetsuya Kao Corporation, Research ,  ICHIMURA, Ikuhisa Kao Corporation, Research ,  OKUDA, Shinsuke Kao Corporation, Research

IPC分类号： C23C18/28 ,  C23C18/31 ,  G11B7/26 ,  C23C18/26

CPC分类号： G11B7/261 ,  C23C18/26

摘要： A method and an apparatus for producing a stamper capable of producing in a high yield a stamper for producing a high quality optical disk. According to the conventional production technology of stampers, primary tin ions in a sensitizer containing the tin ions used for electric conduction treatment of a substrate surface are readily oxidized by dissolved oxygen and cause defects during the production of stampers. Therefore, even when a production apparatus is automated, substantially daily maintenance is necessary so as to keep satisfactory yield. The present invention carries out the electric conduction treatment of the substrate surface by treating the substrate surface by a treating solution containing a compound having a betaine structure and a polyoxyethylenealkylamine compound, then treating it by a colloidal solution containing tin and palladium and further conducting electroless plating. In this way, the present invention makes the maintenance work easier in an automated process and makes it possible to produce a high quality stamper with a high production yield.

摘要翻译： 一种用于制造在能够以高收率制造用于产生高质量的光盘的压模的压模的方法和装置。 。根据压模的常规的生产技术，在敏化剂初级锡离子含有用于导电处理的表面基板的锡离子容易被溶解的氧和引起的缺陷的生产压模的过程中被氧化。 因此，即使当制造装置是自动的，基本上每日保养是必要的，以便保持令人满意的产率。 本发明通过用处理溶液含有具有甜菜碱结构和聚氧乙烯烷基化合物的化合物处理所述基板表面上，然后用含有锡和钯的胶体溶液处理它，并进一步地进行非电解镀进行基板表面的电传导处理 ， 以这种方式，本发明使得在维护工作变得更加容易，在自动过程，并且使得能够制造高品质的压模以高生产成品率。