发明公开
- 专利标题： Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit
- 专利标题（中）： 悬臂单元和原子力显微镜，磁力显微镜，以及再现和信息处理装置，以便
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申请号： EP97200263.8申请日： 1992-04-09
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公开(公告)号： EP0791803A3公开(公告)日： 1997-10-22
- 发明人: Kuroda, Ryo , Hatanaka, Katsunori , Miyazaki, Toshihiko , Yagi, Takayuki , Kawase, Toshimitsu , Shinjo, Katsuhiko
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 代理机构： Beresford, Keith Denis Lewis
- 优先权： JP103634/91 19910410
- 主分类号： G01B7/34
- IPC分类号： G01B7/34 ; G01R33/038
摘要：
A cantilever unit comprises a cantilever for supporting a probe and a displacement amount detecting means, the displacement amount detecting means being integrated with the cantilever. An information processing apparatus comprises the cantilever unit and optionally an information recording medium stationed in close vicinity to the unit, wherein an information in the medium is reproduced at a signal on the basis of a displacement amount of the cantilever. An atomic force microscope and magnetic force microscope comprise the cantilever unit, respectively.
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