An air/fuel ratio sensor is controlled such that the oxygen concentration of the measurement gas can be detected from a pump current substantially instantaneously after a heater turns on. In the air/fuel ratio sensor an oxygen pumping cell and an oxygen concentration measuring cell are each formed of a solid electrolytic layer interposed between a pair of porous electrodes. One of the electrodes of each cell defines a measurement gas chamber in which the diffusion of the measurement gas is controlled. After a micro current is supplied to the other electrode of the oxygen concentration measuring cell for a predetermined period of time, thereby forming an internal reference oxygen source, the supply of the micro current is stopped and at the same time a pump current in the oxygen pumping cell starts to be controlled until the interelectrode voltage of the oxygen concentration measuring cell reaches a target voltage. After the air/fuel ratio sensor is activated, the supply of the micro current is restarted.