发明公开
EP0884785A3 Trench capacitor dram cell with vertical transistor
失效
DRAM-Zelle mit Graben-Kondensator和Vertikalem晶体管
- 专利标题: Trench capacitor dram cell with vertical transistor
- 专利标题(中): DRAM-Zelle mit Graben-Kondensator和Vertikalem晶体管
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申请号: EP98109684.5申请日: 1998-05-28
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公开(公告)号: EP0884785A3公开(公告)日: 2001-10-10
- 发明人: Alsmeier, Johann
- 申请人: SIEMENS AKTIENGESELLSCHAFT
- 申请人地址: Wittelsbacherplatz 2 80333 München DE
- 专利权人: SIEMENS AKTIENGESELLSCHAFT
- 当前专利权人: SIEMENS AKTIENGESELLSCHAFT
- 当前专利权人地址: Wittelsbacherplatz 2 80333 München DE
- 代理机构: Patentanwälte Westphal, Mussgnug & Partner
- 优先权: US872780 19970611
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
A vertical transistor used in a memory cell, such as a DRAM cell, having a trench capacitor. The vertical transistor comprises a gate which includes a horizontal portion (253) and a vertical portion (245) located above the trench capacitor.
公开/授权文献
- EP0884785B1 Trench capacitor dram cell with vertical transistor 公开/授权日:2006-07-12
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