发明公开
EP0905783A1 Vertical transistor implemented in a memory cell comprising a trench capacitor
有权
Vertikaler晶体管在einer Speicherzelle mit Grabenkondensator中实现
- 专利标题: Vertical transistor implemented in a memory cell comprising a trench capacitor
- 专利标题(中): Vertikaler晶体管在einer Speicherzelle mit Grabenkondensator中实现
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申请号: EP98115567.4申请日: 1998-08-19
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公开(公告)号: EP0905783A1公开(公告)日: 1999-03-31
- 发明人: Alsmeier, Johann
- 申请人: SIEMENS AKTIENGESELLSCHAFT
- 申请人地址: Wittelsbacherplatz 2 80333 München DE
- 专利权人: SIEMENS AKTIENGESELLSCHAFT
- 当前专利权人: SIEMENS AKTIENGESELLSCHAFT
- 当前专利权人地址: Wittelsbacherplatz 2 80333 München DE
- 代理机构: Patentanwälte Westphal, Mussgnug & Partner
- 优先权: US940649 19970930
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
A vertical transistor (258) used in a memory cell, such as a DRAM cell, having a trench capacitor (210). The vertical transistor (258) comprises a gate which includes a horizontal portion (253) and a vertical portion (245) located above the trench capacitor (210).
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