发明公开
- 专利标题: Toroidal filament for plasma generation
- 专利标题(中): Toroidförmiges灯丝zur Plasmaerzeugung
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申请号: EP99306209.0申请日: 1999-08-05
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公开(公告)号: EP0980088A1公开(公告)日: 2000-02-16
- 发明人: Chen, Jiong , Capodilupo, Ronald Anthony , Barusso, Scott , Ring, Philip John , Jin, Kui
- 申请人: EATON CORPORATION
- 申请人地址: Eaton Center, 1111 Superior Avenue Cleveland, Ohio 44114-2584 US
- 专利权人: EATON CORPORATION
- 当前专利权人: EATON CORPORATION
- 当前专利权人地址: Eaton Center, 1111 Superior Avenue Cleveland, Ohio 44114-2584 US
- 代理机构: Burke, Steven David
- 优先权: US130662 19980807
- 主分类号: H01J1/16
- IPC分类号: H01J1/16 ; H01J27/20
摘要:
A filament (18) for an ion implanter ion source or plasma shower is provided comprising first and second legs (20a, 20b) and a thermally emissive central portion (40) having ends connected, respectively, to the first and second legs. Preferably, the legs (20a, 20b) are constructed from tantalum (Ta), and the thermally emissive portion (40) is constructed of tungsten (W). The thermally emissive portion is coiled substantially along the entire length thereof and formed in the shape of a generally closed loop, such as a toroid. The toroid is comprised of two toroid halves (40a, 40b) coiled in opposite directions. The toroid halves are constructed of a plurality of filament strands (42, 44, 46) twisted together along substantially the entire length thereof. The coils of the toroid are capable of establishing closed loop magnetic field lines (B) therein when electrical current flows through the thermally emissive portion. The closed loop magnetic field lines (B) confine electrons (E) emitted from the surface of the thermally emissive portion within the confines of the coils.
公开/授权文献
- EP0980088B1 Toroidal filament for plasma generation 公开/授权日:2003-10-08
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