公开(公告)号：EP0980088A1

公开(公告)日：2000-02-16

申请号：EP99306209.0

申请日：1999-08-05

申请人： EATON CORPORATION

发明人： Chen, Jiong ,  Capodilupo, Ronald Anthony ,  Barusso, Scott ,  Ring, Philip John ,  Jin, Kui

IPC分类号： H01J1/16 ,  H01J27/20

CPC分类号： H01J1/16 ,  H01J27/022 ,  H01J2237/31701

摘要： A filament (18) for an ion implanter ion source or plasma shower is provided comprising first and second legs (20a, 20b) and a thermally emissive central portion (40) having ends connected, respectively, to the first and second legs. Preferably, the legs (20a, 20b) are constructed from tantalum (Ta), and the thermally emissive portion (40) is constructed of tungsten (W). The thermally emissive portion is coiled substantially along the entire length thereof and formed in the shape of a generally closed loop, such as a toroid. The toroid is comprised of two toroid halves (40a, 40b) coiled in opposite directions. The toroid halves are constructed of a plurality of filament strands (42, 44, 46) twisted together along substantially the entire length thereof. The coils of the toroid are capable of establishing closed loop magnetic field lines (B) therein when electrical current flows through the thermally emissive portion. The closed loop magnetic field lines (B) confine electrons (E) emitted from the surface of the thermally emissive portion within the confines of the coils.

摘要翻译： 提供了用于离子注入离子源或等离子体淋浴器的细丝（18），其包括分别连接到第一和第二腿部的端部的第一和第二腿部（20a，20b）和热发射中心部分（40）。 优选地，腿（20a，20b）由钽（Ta）构成，并且热发射部分（40）由钨（W）构成。 热发射部分基本上沿着其整个长度盘绕并且形成为大致闭合的环的形状，例如环形线圈。 环形线圈由在相反方向盘绕的两个环形半部（40a，40b）组成。 环形半部由沿其大致整个长度扭绞在一起的多个细丝股线（42,44,46）构成。 当电流流过热发射部分时，环形线圈的线圈能够在其中建立闭环磁场线（B）。 闭环磁场线（B）限制从线圈内的热发射部分的表面发射的电子（E）。