发明公开
EP0985533A4 ELECTROSTATIC ACTUATOR, ITS MANUFACTURING METHOD, AND LIQUID INJECTION DEVICE USING THEM
有权
静电驱动器,其制造的IT流程和那些用于液体喷射装置
- 专利标题: ELECTROSTATIC ACTUATOR, ITS MANUFACTURING METHOD, AND LIQUID INJECTION DEVICE USING THEM
- 专利标题(中): 静电驱动器,其制造的IT流程和那些用于液体喷射装置
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申请号: EP99909216申请日: 1999-03-17
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公开(公告)号: EP0985533A4公开(公告)日: 2001-03-21
- 发明人: FUJII MASAHIRO , MARUYAMA HIROYUKI , SATO KAZUHIKO , KITAHARA KOJI , MAKIGAKI TOMOHIRO , NOJIMA SHIGEO , TAKEKOSHI TARO
- 申请人: SEIKO EPSON CORP
- 专利权人: SEIKO EPSON CORP
- 当前专利权人: SEIKO EPSON CORP
- 优先权: JP6910598 1998-03-18
- 主分类号: B41J2/14
- IPC分类号: B41J2/14 ; B41J2/16 ; B41J2/045 ; B41J2/055
摘要:
An electrostatic ink jet head (1) using an electrostatic actuator and its manufacturing method, comprising pressure chambers (6) communicating with ink nozzles (21) and an atmospheric pressure chamber (12) open to the atmosphere, wherein diaphragms (5) are formed on the bottom surfaces of the pressure chambers (6), a voltage is applied between the diaphragms (5) and electrodes (43) to vibrate the diaphragms (5) electrostatically so as to inject ink droplets, vibration chambers (41) communicate with a pressure compensating chamber (49), a displacement plate (16) which is displaceable toward the outside of the bottom surface of the pressure compensating chamber (49) according to a variation in atmospheric pressure is formed on the bottom surface of the pressure compensating chamber (49), the volume of the pressure compensating chamber (49) is increased or decreased according to the displacement of the displacement plate (16) so that the inside pressure of each vibration chamber (41) communicating with the pressure compensating chamber (49) is regulated to the atmospheric pressure, whereby the vibration characteristics of the diaphragms (5) can be kept constant even if the atmospheric pressure is varied so as to maintain an appropriate ink-droplet injecting operation.
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