公开(公告)号：EP0985534A4

公开(公告)日：2001-03-28

申请号：EP98919579

申请日：1998-05-13

申请人： SEIKO EPSON CORP

发明人： MAKIGAKI TOMOHIRO ,  TAKEKOSHI TARO ,  FUJII MASAHIRO ,  KITAHARA KOJI ,  FUJITA SEIICHI

IPC分类号： B41J2/16 ,  B81B1/00

CPC分类号： B41J2/1629 ,  B41J2/16 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1635 ,  B41J2002/043 ,  B41J2002/14387 ,  B41J2002/14411

摘要： A cross-sectionally stepped nozzle (21) having a nozzle portion (21a) of a smaller cross-sectional area provided at a front part with respect to the jetting direction and a nozzle portion (21b) of a larger cross-sectional area provided at a rear part with respect thereto is formed by etching a silicon wafer (200) on which a nozzle plate (2) is to be formed. A method of forming the nozzle (21) comprises forming a resist film (210) on a surface (200a) of a silicon wafer (200), subjecting this resist film (210) to patterning by half etching and patterning by full etching, subjecting the resultant product to anisotropic dry etching by ICP discharge to form a groove in a full etched portion, removing the resist film on the half etched portion by etching, and subjecting the same portion to anisotropic dry etching again by ICP discharge. Consequently, a nozzle having a stepped cross-sectional shape and a large effect in aligning the direction of a pressure, which is applied from the side of a cavity to the nozzle, parallel to the axis of the nozzle can be formed simply and efficiently on a single-crystal silicon substrate.

公开(公告)号：EP0985533A4

公开(公告)日：2001-03-21

申请号：EP99909216

申请日：1999-03-17

申请人： SEIKO EPSON CORP

发明人： FUJII MASAHIRO ,  MARUYAMA HIROYUKI ,  SATO KAZUHIKO ,  KITAHARA KOJI ,  MAKIGAKI TOMOHIRO ,  NOJIMA SHIGEO ,  TAKEKOSHI TARO

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/045 ,  B41J2/055

CPC分类号： B41J2/1626 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/164 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2002/14411 ,  B41J2202/03 ,  Y10T29/42

摘要： An electrostatic ink jet head (1) using an electrostatic actuator and its manufacturing method, comprising pressure chambers (6) communicating with ink nozzles (21) and an atmospheric pressure chamber (12) open to the atmosphere, wherein diaphragms (5) are formed on the bottom surfaces of the pressure chambers (6), a voltage is applied between the diaphragms (5) and electrodes (43) to vibrate the diaphragms (5) electrostatically so as to inject ink droplets, vibration chambers (41) communicate with a pressure compensating chamber (49), a displacement plate (16) which is displaceable toward the outside of the bottom surface of the pressure compensating chamber (49) according to a variation in atmospheric pressure is formed on the bottom surface of the pressure compensating chamber (49), the volume of the pressure compensating chamber (49) is increased or decreased according to the displacement of the displacement plate (16) so that the inside pressure of each vibration chamber (41) communicating with the pressure compensating chamber (49) is regulated to the atmospheric pressure, whereby the vibration characteristics of the diaphragms (5) can be kept constant even if the atmospheric pressure is varied so as to maintain an appropriate ink-droplet injecting operation.

公开(公告)号：EP0608432A4

公开(公告)日：1996-04-10

申请号：EP93914992

申请日：1993-07-13

申请人： SEIKO EPSON CORP

发明人： TAKEKOSHI TARO ,  YONEKUBO MASATOSHI ,  TAKEDA TAKASHI ,  ARIMURA TOSHIO

IPC分类号： G02B5/30 ,  G11B7/09 ,  G11B7/13 ,  G11B7/135 ,  G11B11/105

CPC分类号： G11B11/10543 ,  G02B5/3025 ,  G11B7/094 ,  G11B7/131 ,  G11B7/1353 ,  G11B7/1356 ,  G11B7/1365 ,  G11B7/1381 ,  G11B11/10532 ,  G11B11/10536 ,  G11B2007/13727

摘要： A plurality of slant faces (1419) are formed on a substrate (1406). A polarized optical thin film is formed on the slant faces. The recess defined by the slant faces (1419) is filled with transparent material to form a small composite polarizing element. By this polarizing element, it is possible to detect magneto-optic signals excellent in transmissivity and extinction ratio and high in S/N ratio. Also, this polarizing element serves as the cover of the package (1408) of an optical head which houses a photodetecting element (1409) and a light emitting element (1411) integrally. Also, by use of an optical element having an optical path length adjustment function of varying the optical path length of the outgoing light beam from that of the incoming light beam, it is possible to eliminate the initial offset of the focal point error signals and to omit the adjustment at the same time. In this way, a small, simple and high-performance optical head used for magneto-optic recording and reproducing apparatus can be realized.