发明公开
- 专利标题: CAPACITANCE TYPE SENSOR
- 专利标题(中): KAPAZITIVER传感器
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申请号: EP99923943申请日: 1999-06-08
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公开(公告)号: EP1004865A4公开(公告)日: 2008-05-07
- 发明人: ISHIKURA YOSHIYUKI
- 申请人: YAMATAKE CORP
- 专利权人: YAMATAKE CORP
- 当前专利权人: YAMATAKE CORP
- 优先权: JP16042098 1998-06-09
- 主分类号: G01K7/34
- IPC分类号: G01K7/34 ; G01L1/14 ; G01L9/00 ; G01L9/12
摘要:
A capacitance type sensor comprising a first electrode (10a, 10b, 10c, 30) and a second electrode (20a, 20b, 20c, 20d) disposed opposite to and out of contact with each other with the gap between them changing with a change in detected amount, and a signal processing unit (4) for calculating a detected amount based on a capacitance formed between the first and second electrodes, wherein the first electrode is provided with a portion (12a, 14a) of which area opposite to the second electrode increases and a portion (12b, 14b) of which area opposite to the second electrode decreases according to a positional error produced in directions (x, y) parallel to the first electrode, these portions having the same area.
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