摘要:
A capacitance type sensor comprising a first electrode (10a, 10b, 10c, 30) and a second electrode (20a, 20b, 20c, 20d) disposed opposite to and out of contact with each other with the gap between them changing with a change in detected amount, and a signal processing unit (4) for calculating a detected amount based on a capacitance formed between the first and second electrodes, wherein the first electrode is provided with a portion (12a, 14a) of which area opposite to the second electrode increases and a portion (12b, 14b) of which area opposite to the second electrode decreases according to a positional error produced in directions (x, y) parallel to the first electrode, these portions having the same area.
摘要:
A capacity type pressure sensor, comprising a first substrate (1), a first flat plate electrode (1a) disposed on the first substrate (1), a pressure-sensing frame part (4) surrounding the first flat plate electrode (1a) provided on the first substrate (1), second substrates (2, 3) connected to the pressure sensing frame part (4) opposedly to the first substrate (1) and forming a capacity chamber (7) together with the first substrate (1) and the pressure-sensing frame part (4), a stage (5) provided on the second substrates (2, 3) in the capacity chamber (7), separated from the pressure-sensing frame part (4), and opposed to and separated from the first flat plate electrode (1a), and a second flat plate electrode (2a) provided on the stage (5) and opposed to the first flat plate electrode (1a), wherein the pressure-sensing frame part (4) is deformed elastically according to a pressure applied to the first and second substrates (1, 2, 3).
摘要:
A method for manufacturing a pressure sensor which comprises jointing a cover plate (130), which is a plate member made of sapphire, to a pressure sensor tip (110) having a cushioning member (120) fixed thereto by the use of a coating solution prepared by adding titanium dioxide to an aqueous solution of boehmite (AlO(OH)) which is a hydroxymineral of aluminum.
摘要:
A design device which designs a controller in accordance with H infinity (H INFINITY ) logic, wherein formulae of generalized plants and formulae of control object models which are parts of the generalized plants are stored in the memory unit (3). In a parameter calculating means comprising a frequency response calculation unit (4) and a scaling matrix calculation unit (5), the frequency response calculation unit (4) calculates the frequency responses of the control object models, and the scaling matrix calculation unit (5) calculates a scaling matrix (T) in accordance with the frequency responses of the control object models so that the respective gains of the control object models are consistent. A controller calculation unit (6) calculates the parameters of a controller by applying the scaling matrix (T) to the generalized plants.
摘要:
A substrate (101) is coated with an aqueous solution of boehmite (AlO(OH)) which is an aluminum hydroxide to form a coating film (102), and the property of the coating film (102) is modified into alpha -alumina, thereby joining the substrate (101) to a substrate (103).
摘要:
A sewage inflow amount predicting device which has a case base (54) that is one of non-linear black box prediction models prepared from history data (30) including inflow amount data (31) indicating a sewage inflow amount measured at a sewage treatment plant (10) and meteorological data (33) associated with this inflow amount data (31), and which predicts in real time a sewage inflow amount that flows in a specified prediction time later set according to an input prediction condition (40) by using the case base (54) and outputs inflow amount prediction data (20) at a similar case retrieving unit (56) and an output estimating unit (57).