发明授权
- 专利标题: STORAGE ASSEMBLY FOR WAFERS
- 专利标题(中): 存储器装置晶片
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申请号: EP98967122.7申请日: 1998-07-03
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公开(公告)号: EP1016128B1公开(公告)日: 2004-08-04
- 发明人: Zinger, Jan , Snijders, Gert-Jan , Kooijman, Cornelis Marinus
- 申请人: ASM INTERNATIONAL N.V.
- 申请人地址: P.O. Box 100 3720 AC Bilthoven NL
- 专利权人: ASM INTERNATIONAL N.V.
- 当前专利权人: ASM INTERNATIONAL N.V.
- 当前专利权人地址: P.O. Box 100 3720 AC Bilthoven NL
- 代理机构: van Westenbrugge, Andries
- 优先权: NL1006461 19970703
- 国际公布: WO1999001894 19990114
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Storage assembly provided with a robot for placing cassettes, which are filled with wafers, in a carousel, comprising a number of magazines. These magazines lie both above one another and next to one another. In order to be able to determine the correct position of the head of the robot which holds the cassettes with respect to the magazines, it is proposed to provide sensor means which determine the vertical position of the head with respect to the base plate of the magazines and sensor means for determining the horizontal position of the head with respect to the magazines. This horizontal position is determined using openings arranged in the base plate of the magazines. In particular, a main opening and an auxiliary opening are present.
公开/授权文献
- EP1016128A1 STORAGE ASSEMBLY FOR WAFERS 公开/授权日:2000-07-05
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