发明授权
- 专利标题: Flip chip bump bonding
- 专利标题(中): 使用焊料凸点的倒装式接合
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申请号: EP00301175.6申请日: 2000-02-18
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公开(公告)号: EP1032030B1公开(公告)日: 2011-06-22
- 发明人: Degani, Yinon , Kossives, Dean Paul
- 申请人: Agere Systems Optoelectronics Guardian Corporation
- 申请人地址: 9333 South John Young Parkway Orlando, Florida 32819-8698 US
- 专利权人: Agere Systems Optoelectronics Guardian Corporation
- 当前专利权人: Agere Systems Optoelectronics Guardian Corporation
- 当前专利权人地址: 9333 South John Young Parkway Orlando, Florida 32819-8698 US
- 代理机构: Perkins, Sarah
- 优先权: US256443 19990223
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; H01L23/485
摘要:
The specification describes techniques for applying solder bumps to IC chips. The solder bump sites are first provided with under bump metallization (UBM) for solder bump interconnections to the Al bonding sites on the IC chip. The substrate, i.e. the capping layer of the IC chip, is coated with photoresist and patterned to expose the UBM and a peripheral portion of the capping layer around the UBM. The solder paste is then applied and reflowed to form the solder bump. Since the photoresist hardens and becomes difficult to remove after the reflow step, a sacrificial buffer layer is interposed between the photoresist and the capping layer to facilitate removal of the photoresist without attacking the IC chip surface.
公开/授权文献
- EP1032030A3 Flip chip bump bonding 公开/授权日:2002-01-02
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