发明公开
EP1059979A4 MICROMACHINED MEMBRANE PARTICLE FILTER USING PARYLENE REINFORCEMENT
审中-公开
聚对二甲苯GAIN MICRO-制得的颗粒过滤膜
- 专利标题： MICROMACHINED MEMBRANE PARTICLE FILTER USING PARYLENE REINFORCEMENT
- 专利标题（中）： 聚对二甲苯GAIN MICRO-制得的颗粒过滤膜
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申请号： EP98957706申请日： 1998-11-06
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公开(公告)号： EP1059979A4公开(公告)日： 2001-05-30
- 发明人: TAI YU-CHONG , YANG XING
- 申请人： CALIFORNIA INST OF TECHN
- 专利权人： CALIFORNIA INST OF TECHN
- 当前专利权人： CALIFORNIA INST OF TECHN
- 优先权： US6480797 1997-11-07
- 主分类号： B01D39/20
- IPC分类号： B01D39/20 ; B01D67/00 ; B01D71/02 ; B01D71/72 ; B01D24/00 ; B01D39/16 ; B31D3/00 ; G03F7/12
摘要：
A micromachined membrane particle filter is formed by etching a silicon substrate (104) and silicon nitride overlayers (100 and 102) and coating the entire membrane structure with a layer of parylene (150) for the purposes of imparting the characteristics of strength and biocompatibility.
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