发明授权
- 专利标题: BIPOLARTRANSISTOR UND VERFAHREN ZU SEINER HERSTELLUNG
- 专利标题(英): Bipolar transistor and method for producing same
- 专利标题(中): 双极晶体管及其制造方法
-
申请号: EP99955791.1申请日: 1999-09-20
-
公开(公告)号: EP1118124B1公开(公告)日: 2010-12-01
- 发明人: EHWALD, Karl-Ernst , TILLACK, Bernd , HEINEMANN, Bernd , KNOLL, Dieter , WOLANSKY, Dirk
- 申请人: IHP GmbH-Innovations for High Performance Microelectronics / Leibniz-Institut für innovative Mikroelektronik
- 申请人地址: Im Technologiepark 25 15236 Frankfurt / Oder DE
- 专利权人: IHP GmbH-Innovations for High Performance Microelectronics / Leibniz-Institut für innovative Mikroelektronik
- 当前专利权人: IHP GmbH-Innovations for High Performance Microelectronics / Leibniz-Institut für innovative Mikroelektronik
- 当前专利权人地址: Im Technologiepark 25 15236 Frankfurt / Oder DE
- 代理机构: Eisenführ, Speiser & Partner
- 优先权: DE19845793 19980921
- 国际公布: WO2000017933 20000330
- 主分类号: H01L29/732
- IPC分类号: H01L29/732 ; H01L21/331
摘要:
The invention relates to a bipolar transistor and a method for producing same. The aim of the invention is to provide a bipolar transistor and a method for producing same, which during the use of a single-process poly-silicon technology with differential epitaxis for the production of bases overcomes the disadvantages of conventional systems, so as notably further to improve the high-speed properties of a bipolar transistor, provide highly conductive connections between the metal contacts and the active (internal) transistor region and a minimized passive transistor surface while at the same time avoiding greater process complexity and increased contact resistances. To this end, by creating suitable epitaxis conditions a poly-silicon layer is deposited on the insulating area which is thicker than the epitaxis layer in the active transistor area. The greater thickness of the poly-silicon layer in relation to the epitaxis layer is achieved through the use of a very low temperature for the deposition of part or all of the buffer layer. Th use of a very low deposition temperature results in improved seeding of the insulating layer and a reduction in the deposition dead time, which makes it possible to produce a thicker layer on the insulating layer than in the active transistor area.
公开/授权文献
- EP1118124A1 BIPOLARTRANSISTOR UND VERFAHREN ZU SEINER HERSTELLUNG 公开/授权日:2001-07-25
信息查询
IPC分类: