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发明公开
EP1142928A1 Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin compounds 有权
聚硅氧烷，制造，含硅脂环族化合物，和对辐射敏感的树脂的化合物的方法

Polysiloxane, method of manufacturing same, silicon-containing alicyclic compound, and radiation-sensitive resin compounds
摘要：
A novel polysiloxane having the following structural units (I) and/or (II) and the structural unit (III),
wherein A 1 and A 2 are an acid-dissociable monovalent organic group, R 1 is hydrogen, monovalent (halogenated) hydrocarbon, halogen, or amino, R 2 is monovalent (halogenated) hydrocarbon group, or halogen. A method of preparing such a polysiloxane, a silicon-containing alicyclic compound providing this polysiloxane, and a radiation-sensitive resin composition comprising this polysiloxane are also provided. The polysiloxane is useful as a resin component for a resist material, effectively senses radiation with a short wavelength, exhibits high transparency to radiation and superior dry etching properties, and excels in basic resist properties required for resist materials such as high sensitivity, resolution, developability, etc.
摘要（中）：

一种新颖的聚硅氧烷具有下述结构单元（I）和/或（II）和结构单元（III） worin A <1>和A <2>是上酸解离性的一价有机基团，R <1 >是氢，一价（卤代）烃，卤素，或氨基，R <2>是单价的（卤代）烃基，或卤素。 寻求制备的聚硅氧烷的方法，因此，提供一个含有硅的脂环化合物提供这种聚硅氧烷，和一种辐射敏感性树脂组合物含有该聚硅氧烷。 的聚硅氧烷是作为抗蚀剂材料的树脂成分是有用的，有效感测辐射具有短波长，显示出高的透明度，以辐射和优异的干蚀刻性能，并在抗蚀剂材料所要求的基本的抗蚀剂性能优异：诸如高灵敏度，分辨率，可显影 等等。

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