发明公开
- 专利标题: VERFAHREN ZUR HERSTELLUNG ELEKTRISCH LEITENDER VERBINDUNGEN
- 专利标题(英): Method for producing electrically conductive connections
- 专利标题(中): 方法产生电铅化合物
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申请号: EP00914028.6申请日: 2000-02-11
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公开(公告)号: EP1155445A1公开(公告)日: 2001-11-21
- 发明人: SEIDOWSKI, Thomas , KRIEBEL, Frank , SADOWSKI, Günter
- 申请人: KSW Microtec Gesellschaft für Angewandte Mikrotechnik mbH Dresden
- 申请人地址: Gostritzer Strasse 63 01217 Dresden DE
- 专利权人: KSW Microtec Gesellschaft für Angewandte Mikrotechnik mbH Dresden
- 当前专利权人: KSW Microtec Gesellschaft für Angewandte Mikrotechnik mbH Dresden
- 当前专利权人地址: Gostritzer Strasse 63 01217 Dresden DE
- 代理机构: Pfenning, Meinig & Partner GbR
- 优先权: DE19905807 19990211
- 国际公布: WO0048242 20000817
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; H01L21/56 ; C23C18/44
摘要:
The invention relates to electrically conductive connections between individuals contacts of electronic components having electrically conductive conductor structures configured on a substrate. The invention is based on the known flip chip technology and aims at providing the possibility of achieving a cost-effective and better transfer safety in an electrically conductive connection between the contacts of electronic components and conductor structures consisting of an electrically conductive material. To this end, electronic components are used whose connection bumps are configured by currentless deposition primarily of palladium. The connection bumps project beyond the base of the component, are directly pressed on the conductor structure and permanently connected to the substrate by means of a material or a polymer film exerting a pressure or tensile force as a result of volume reduction.
公开/授权文献
- EP1155445B1 VERFAHREN ZUR HERSTELLUNG ELEKTRISCH LEITENDER VERBINDUNGEN 公开/授权日:2005-07-06
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