发明公开
- 专利标题： HOT PLATE UNIT
- 专利标题（中）： 甲热板
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申请号： EP01926082申请日： 2001-05-01
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公开(公告)号： EP1211912A4公开(公告)日： 2003-02-12
- 发明人: HIRAMATSU YASUJI , ITO YASUTAKA
- 申请人： IBIDEN CO LTD
- 专利权人： IBIDEN CO LTD
- 当前专利权人： IBIDEN CO LTD
- 优先权： JP2000133534 2000-05-02; JP2000305175 2000-10-04
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/027 ; H05B1/02 ; H05B3/14 ; H05B3/16 ; H05B3/18 ; H05B3/28 ; H05B3/68 ; H05B3/20
摘要：
A hot plate unit capable of sufficiently increasing a temperature rising and lowering rate even if the diameter of a substrate is increased and reducing a size, characterized in that the substrate having a temperature control means is installed on a supporting container and the thickness of the supporting container is 50 mm or thinner.
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