公开(公告)号：EP1254874A4

公开(公告)日：2005-01-05

申请号：EP00913091

申请日：2000-04-04

申请人： IBIDEN CO LTD

发明人： HIRAMATSU YASUJI ,  ITO YASUTAKA

IPC分类号： C04B35/581 ,  C04B35/593 ,  C04B35/597 ,  C04B35/634 ,  C04B35/645 ,  G01R1/073 ,  G01R3/00 ,  H01L21/683

CPC分类号： C04B35/597 ,  C04B35/581 ,  C04B35/593 ,  C04B35/6303 ,  C04B35/63424 ,  C04B35/645 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3208 ,  C04B2235/3217 ,  C04B2235/3225 ,  C04B2235/3418 ,  C04B2235/3865 ,  C04B2235/3873 ,  C04B2235/425 ,  C04B2235/48 ,  C04B2235/6025 ,  C04B2235/721 ,  C04B2235/96 ,  C04B2235/9607 ,  G01R1/07307 ,  G01R3/00 ,  H01L21/6833

摘要： A carbon-containing aluminum nitride sintered compact comprising an aluminum nitride matrix and, incorporated therein, a carbon which has peaks appearing in the vicinity of 1580 cm and 1355 cm as measured by the laser Raman spectrometry. The carbon-containing aluminum nitride sintered compact does not suffer from a short circuit due to its satisfactorily high volume resistivity of at least 1 x 10 OMEGA • cm in a high temperature region of 200 DEG C or higher (for example, 500 DEG C or so), is excellent in hiding properties, is increased with respect to radiant heat and can secure high accuracy in the measurement by a surface thermometer.

公开(公告)号：EP1213753A4

公开(公告)日：2004-12-08

申请号：EP00904018

申请日：2000-02-18

申请人： IBIDEN CO LTD

发明人： ITO YASUTAKA ,  HIRAMATSU YASUJI

IPC分类号： C04B35/00 ,  C04B35/581 ,  H01L21/027 ,  H01L21/66 ,  H01L21/68 ,  H01L21/683 ,  H05B3/02 ,  H05B3/14 ,  H05B3/20

CPC分类号： H01L21/6835 ,  C04B35/00 ,  C04B35/581 ,  H01L21/6833 ,  H01L2924/30105

摘要： A ceramic substrate for use in semiconductor producing and inspecting devices, having a reduced rate of emission of α-rays and capable of preventing the malfunction of heaters, wafer probers, etc. and the reduction of chucking force, and reducing the number of particles adhering to semiconductor wafers, thereby ensuring that no wiring defects occur in semiconductor wafers. This ceramic substrate for use in semiconductor producing and inspecting devices is characterized in that the rate of emission of α-rays from the surface of the ceramic substrate is not more than 0.250 c/cm2 • hr.

公开(公告)号：EP1211912A4

公开(公告)日：2003-02-12

申请号：EP01926082

申请日：2001-05-01

申请人： IBIDEN CO LTD

发明人： HIRAMATSU YASUJI ,  ITO YASUTAKA

IPC分类号： H01L21/00 ,  H01L21/027 ,  H05B1/02 ,  H05B3/14 ,  H05B3/16 ,  H05B3/18 ,  H05B3/28 ,  H05B3/68 ,  H05B3/20

CPC分类号： H05B1/0233 ,  H01L21/67109 ,  H05B3/143 ,  H05B3/283 ,  H05B3/68

摘要： A hot plate unit capable of sufficiently increasing a temperature rising and lowering rate even if the diameter of a substrate is increased and reducing a size, characterized in that the substrate having a temperature control means is installed on a supporting container and the thickness of the supporting container is 50 mm or thinner.

公开(公告)号：EP1185145A4

公开(公告)日：2003-01-15

申请号：EP00948352

申请日：2000-08-01

申请人： IBIDEN CO LTD

发明人： ITO YASUTAKA ,  HIRAMATSU YASUJI

IPC分类号： H05B3/20 ,  H01L21/00 ,  H01L21/027 ,  H05B3/10 ,  H05B3/14 ,  H05B3/16 ,  H05B3/26 ,  H05B3/28 ,  H05B3/68 ,  H05B3/74 ,  H01L21/30 ,  H05B3/18 ,  H05B3/56

CPC分类号： H01L21/67109 ,  H01L21/67103 ,  H05B3/143 ,  H05B3/265 ,  H05B3/283 ,  H05B3/74

摘要： The invention provides a ceramic heater that makes the temperature of a ceramic substrate uniform by suppressing the transfer of heat from the ceramic heater to a housing. The ceramic heater includes a heater formed on or under the surface of a ceramic substrate, and the surface roughness on the side of the ceramic substrate is JIS B 0601 Rmax=0.1-200 mu m.

摘要翻译： 本发明提供一种陶瓷加热器，其通过抑制从陶瓷加热器向壳体的转移而使陶瓷基板的温度均匀。 陶瓷加热器包括形成在陶瓷基板的表面上或下方的加热器，陶瓷基板侧的表面粗糙度为JIS B 0601 Rmax = 0.1〜200μm。

公开(公告)号：EP1469330A4

公开(公告)日：2009-09-23

申请号：EP03731834

申请日：2003-01-24

申请人： IBIDEN CO LTD

发明人： MORI MIKIO ,  SAKAMOTO HAJIME ,  ITO YASUTAKA

IPC分类号： G02B6/12 ,  G02B6/42 ,  G02B7/00 ,  H05B3/10

CPC分类号： G02B6/12007 ,  G02B6/4201 ,  G02B6/4271 ,  G02B2006/12135

公开(公告)号：EP1475651A4

公开(公告)日：2006-08-09

申请号：EP03701735

申请日：2003-01-16

申请人： IBIDEN CO LTD

发明人： MORI MIKIO ,  SAKAMOTO HAJIME ,  ITO YASUTAKA

IPC分类号： G02B6/12 ,  G02B6/30 ,  G02B6/42 ,  G02B7/00

CPC分类号： G02B6/4201 ,  G02B6/12007 ,  G02B6/30 ,  G02B6/4271 ,  G02B2006/12135 ,  G02F2203/21

摘要： A waveguide type optical module comprises a temperature control element supported in a casing via a pedestal and an optical waveguide element provided on the temperature control element. The temperature control element has a heating body or a heat-absorbing body on a surface of or inside of a counter-heating surface side of a plate-like body. The plate-like body is supported so that the contact area with the pedestal is 30% or under. With this configuration, it is possible to provide the waveguide type optical module having excellent demultiplexing wavelength characteristic, and the temperature control component and the temperature control element for the waveguide type optical module producing less particles and having high uniformity in the in-plane temperature distribution.

摘要翻译： 提供一种波导型光学模块，其包括支撑在壳体内的基座上的温度控制元件和设置在温度控制元件上的光波导。 加热控制元件包括具有设置在其非加热侧上或埋入其中的加热器或吸热体的板。 该板被支撑在基座上，其面积小于板的面积的30％。 由于这样的结构，波导型光模块具有良好的波长解复用特性，而在光模块中使用的温度控制器和控制元件不会发生颗粒分离，并且显示出高的板表面温度均匀性。

公开(公告)号：EP1124404A4

公开(公告)日：2003-01-29

申请号：EP00902965

申请日：2000-02-15

申请人： IBIDEN CO LTD

发明人： ITO YASUTAKA

IPC分类号： H05B3/14 ,  H05B3/28 ,  H05B3/10 ,  H05B3/20

CPC分类号： H05B3/143 ,  H05B3/283

摘要： A shock-resistant refractory ceramic heater is provided. In producing a ceramic substrate (12), a green sheet made of slurry containing ceramic powder is provided with heater elements (14a, 14b) on its surfaces. The green sheet is sandwiched between other green sheets and sintered. The surface level (P1a) of the heater elements (14a) is deviated vertically from the surface level (P1b) of the heater elements (14b).

公开(公告)号：EP1130627A4

公开(公告)日：2001-11-14

申请号：EP00944434

申请日：2000-07-17

申请人： IBIDEN CO LTD

发明人： FURUKAWA MASAKAZU ,  ITO YASUTAKA

IPC分类号： H01L21/027 ,  H01L21/00 ,  H05B3/20

CPC分类号： H01L21/67103

摘要： A hot plate unit (1) capable of uniformly cooling a hot plate in a short time, comprising a hot plate (3) having heating elements (10) and a casing (2) supporting the hot plate, wherein the hot plate and the casing forms an internal space S1, and two flow-in ports (17) and two underside opening parts (31) are formed in a bottom wall (2a) of the casing.

摘要翻译： 能够在短时间内均匀地冷却热板的热板单元。 热板单元（1）包括热板（3），其包括加热元件（10）和支撑热板的壳体（2）。 热板和壳体定义了内部空间S1。 在壳体的底壁（2a）中形成有两个进气口（17）和两个下开口部分（31）。

公开(公告)号：EP2226481A4

公开(公告)日：2010-11-24

申请号：EP08777417

申请日：2008-06-19

申请人： IBIDEN CO LTD ,  TOYOTA MOTOR CO LTD

发明人： ITO YASUTAKA ,  WAKAMATSU JIN

IPC分类号： F01N13/08 ,  B32B15/04 ,  C23C30/00 ,  F01N3/24 ,  F01N13/16 ,  F01N7/08 ,  F01N7/16

CPC分类号： F01N13/08 ,  C23C24/00 ,  C23C24/08 ,  C23C24/10 ,  C23C26/00 ,  F01N13/141 ,  F01N13/16 ,  F01N2240/02

公开(公告)号：EP1249433A4

公开(公告)日：2005-01-05

申请号：EP00927747

申请日：2000-05-12

申请人： IBIDEN CO LTD

发明人： ITO YASUTAKA ,  HIRAMATSU YASUJI

IPC分类号： C04B35/581 ,  H01L21/00 ,  H01L21/683 ,  H01L23/15

CPC分类号： H01L21/67103 ,  C04B35/581 ,  H01L21/6831 ,  Y10T279/23 ,  Y10T428/24917 ,  Y10T428/30

摘要： A carbon-containing aluminium nitride sintered compact, characterized in that carbon is contained in a matrix comprising an aluminium nitride sintered compact in a amount such that, in its X-ray diffraction chart, a peak ascribed to the carbon can not be detected. The aluminium nitride sintered compact can secure a volume resistivity of 10 OMEGA .cm or more, and can assure high hiding property, great radiation calorie and high accuracy in the measurement by means of a thermoviewer.