发明公开
- 专利标题： Method of depositing optical films
- 专利标题（中）： Verfahren zur Herstellung optischer Schichten
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申请号： EP02253833.4申请日： 2002-05-30
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公开(公告)号： EP1273677A2公开(公告)日： 2003-01-08
- 发明人: Ouellet, Luc , Lachance, Jonathan , Grondin, Manuel , Blain, Stephane
- 申请人： Zarlink Semiconductor Inc.
- 申请人地址： 400 March Road Kanata, Ontario K2K 3H4 CA
- 专利权人： Zarlink Semiconductor Inc.
- 当前专利权人： Zarlink Semiconductor Inc.
- 当前专利权人地址： 400 March Road Kanata, Ontario K2K 3H4 CA
- 代理机构： Harding, Richard Patrick
- 优先权： US867662 20010531
- 主分类号： C23C16/54
- IPC分类号： C23C16/54 ; C23C16/40 ; G02B1/10 ; G02B6/10
摘要：
To deposit optical quality films by PECVD (Plasma Enhanced Chemical Vapour Deposition), a six-dimensional space wherein five dimensions thereof correspond to five respective independent variables of which a set of four independent variables relate to the flow-rate of respective gases, a fifth independent variable relates to total pressure, and a sixth dimension relates to observed FTIR characteristics is first created. Then an optical film is deposited while maintaining three of the set of four independent variables substantially constant as well as the fifth independent variable, and varying a fourth of the set of four independent variables to obtain desired characteristics in the sixth dimension.
公开/授权文献
- EP1273677B1 Method of depositing optical films 公开/授权日：2006-07-12
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