公开(公告)号：EP1273677A2

公开(公告)日：2003-01-08

申请号：EP02253833.4

申请日：2002-05-30

申请人： Zarlink Semiconductor Inc.

发明人： Ouellet, Luc ,  Lachance, Jonathan ,  Grondin, Manuel ,  Blain, Stephane

IPC分类号： C23C16/54 ,  C23C16/40 ,  G02B1/10 ,  G02B6/10

CPC分类号： C23C16/54 ,  C23C16/401

摘要： To deposit optical quality films by PECVD (Plasma Enhanced Chemical Vapour Deposition), a six-dimensional space wherein five dimensions thereof correspond to five respective independent variables of which a set of four independent variables relate to the flow-rate of respective gases, a fifth independent variable relates to total pressure, and a sixth dimension relates to observed FTIR characteristics is first created. Then an optical film is deposited while maintaining three of the set of four independent variables substantially constant as well as the fifth independent variable, and varying a fourth of the set of four independent variables to obtain desired characteristics in the sixth dimension.

摘要翻译： 为了通过PECVD（等离子体增强化学气相沉积）PECVD（等离子体增强化学气相沉积）沉积光学质量膜，其六维空间对应于五个相应的独立变量，其中一组四个独立变量与各气体的流量相关，第五 自变量与总压有关，第六维与观测到的FTIR特征有关。 然后在保持四组独立变量组中的三组基本上恒定的第五个独立变量之间沉积光学薄膜，并改变四组独立变量中的四分之一以获得第六维度的期望特性。