发明公开
EP1278055A4 CANTILEVER FOR VERTICAL SCANNING MICROSCOPE AND PROBE FOR VERTICAL SCAN MICROSCOPE USING IT
审中-公开
悬臂式垂直扫描显微镜和探针垂直扫描显微镜SO
- 专利标题: CANTILEVER FOR VERTICAL SCANNING MICROSCOPE AND PROBE FOR VERTICAL SCAN MICROSCOPE USING IT
- 专利标题(中): 悬臂式垂直扫描显微镜和探针垂直扫描显微镜SO
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申请号: EP01970308申请日: 2001-09-28
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公开(公告)号: EP1278055A4公开(公告)日: 2005-03-02
- 发明人: NAKAYAMA YOSHIKAZU , AKITA SEIJI , HARADA AKIO , OKAWA TAKASHI , TAKANO YUICHI , YASUTAKE MASATOSHI , SHIRAKAWABE YOSHIHARU
- 申请人: DAIKEN CHEMICAL CO LTD , SEIKO INSTR INC , NAKAYAMA YOSHIKAZU
- 专利权人: DAIKEN CHEMICAL CO LTD,SEIKO INSTR INC,NAKAYAMA YOSHIKAZU
- 当前专利权人: DAIKEN CHEMICAL CO LTD,SEIKO INSTR INC,NAKAYAMA YOSHIKAZU
- 优先权: JP2000403558 2000-11-26
- 主分类号: G01Q60/16
- IPC分类号: G01Q60/16 ; G01Q60/32 ; G01Q60/38 ; G01Q70/10 ; G01Q70/12 ; G01N13/16 ; G12B21/02 ; G12B21/08
摘要:
A probe for vertical scanning microscope in which the forward end of a nanotube, serving as a probe, abuts against the sample surface substantially perpendicularly thereto and detects the surface information of the sample with high sensitivity. The inventive probe for vertical scanning microscope is characterized in that a cantilever 2 is provided with a fixing region for bonding the base end part 14 of a nanotube 12 in a probe 20 for scanning microscope which obtains the physical information of the sample surface 24 at the forward end of a nanotube bonded to the cantilever 2, height direction of the fixing region is substantially perpendicular to the mean sample surface 26 when the cantilever 2 is set in the measuring state with respect to the mean sample surface 26 and the base end part 14 of the nanotube 12 is bonded in the height direction of the fixing region.
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