发明公开
EP1296352A1 CHARGED PARTICLE BEAM INSPECTION APPARATUS AND METHOD FOR FABRICATING DEVICE USING THAT INSPECTION APPARATUS
审中-公开
带电粒子束检测装置及使用该装置进行装置制造的方法
- 专利标题： CHARGED PARTICLE BEAM INSPECTION APPARATUS AND METHOD FOR FABRICATING DEVICE USING THAT INSPECTION APPARATUS
- 专利标题（中）： 带电粒子束检测装置及使用该装置进行装置制造的方法
-
申请号： EP01945627.6申请日： 2001-06-27
-
公开(公告)号： EP1296352A1公开(公告)日： 2003-03-26
- 发明人: NAKASUJI, Mamoru , NOJI, Nobuharu , SATAKE, Tohru , HATAKEYAMA, Masahiro , KIMBA, Toshifumi , SOBUKAWA, Hirosi , YOSHIKAWA, Shoji , MURAKAMI, Takeshi , WATANABE, Kenji , KARIMATA, Tsutomu , OOWADA, Shin , SAITO, Mutsumi , YAMAZAKI, Yuichiro , NAGAI, Takamitsu , NAGAHAMA, Ichirota
- 申请人： EBARA CORPORATION , Kabushiki Kaisha Toshiba
- 申请人地址： 11-1, Haneda Asahi-cho Ohta-ku, Tokyo 144-8510 JP
- 专利权人： EBARA CORPORATION,Kabushiki Kaisha Toshiba
- 当前专利权人： EBARA CORPORATION,Kabushiki Kaisha Toshiba
- 当前专利权人地址： 11-1, Haneda Asahi-cho Ohta-ku, Tokyo 144-8510 JP
- 代理机构： Wagner, Karl H., Dipl.-Ing.
- 优先权： JP2000193104 20000627; JP2000229101 20000728; JP2000335934 20001102; JP2001011218 20010119; JP2001031901 20010208; JP2001031906 20010208; JP2001033599 20010209; JP2001035069 20010213; JP2001158662 20010528; JP2001162041 20010530; JP2001189304 20010622
- 国际公布： WO02001596 20020103
- 主分类号： H01J37/29
- IPC分类号： H01J37/29 ; H01J37/244 ; H01J37/20 ; G01B15/00 ; H01L21/66 ; G01N23/225
摘要：
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere;
at least two loading chambers 41,42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.
at least two loading chambers 41,42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.
信息查询
