发明公开
- 专利标题: SULFONIUM SALT COMPOUND
- 专利标题(中): SULPHONIUMSALZ-VERBINDUNG
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申请号: EP01945637申请日: 2001-06-27
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公开(公告)号: EP1314725A4公开(公告)日: 2005-06-29
- 发明人: ISHIHARA MASAMI , SUMINO MOTOSHIGE , FUKASAWA KAZUHITO , KATANO NAOKI , IMAZEKI SHIGEAKI
- 申请人: WAKO PURE CHEM IND LTD
- 专利权人: WAKO PURE CHEM IND LTD
- 当前专利权人: WAKO PURE CHEM IND LTD
- 优先权: JP2000260157 2000-08-30
- 主分类号: C07C53/21
- IPC分类号: C07C53/21 ; C07C381/12 ; G03F7/004 ; G03F7/038 ; G03F7/039 ; C07C321/30 ; C07C53/15 ; C07C67/30 ; C08K5/36 ; C08K5/41 ; C08L25/18 ; G03F7/029
摘要:
A compound represented by the general formula [1] [1] (wherein R , R , and R each independently represents a residue of an aromatic hydrocarbon; Y represents an anion derived from a fluorinated carboxylic acid having three or more carbon atoms; and n is 1 or 2, provided that R , R , and R each is not a phenyl group having a substituent in an ortho and/or a meta position); and a composition comprising the compound and a diazodisulfone compound. Use of the compound or the composition as an acid generator for resists produces the effect of improving the profiles of ultrafine patterns or diminishing side wall irregularities in ultrafine patterns. The compound is also useful as a cationic photopolymerization initiator.
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