发明公开
EP1322901A2 SYSTEM AND METHOD FOR CONTROLLING MOVEMENT OF A WORKPIECE IN A THERMAL PROCESSING SYSTEM
审中-公开
DEVICE AND METHOD FOR控制工件的运动的热处理设备
- 专利标题： SYSTEM AND METHOD FOR CONTROLLING MOVEMENT OF A WORKPIECE IN A THERMAL PROCESSING SYSTEM
- 专利标题（中）： DEVICE AND METHOD FOR控制工件的运动的热处理设备
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申请号： EP01960945.2申请日： 2001-08-24
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公开(公告)号： EP1322901A2公开(公告)日： 2003-07-02
- 发明人: SHAJII, Ali , MATTHEWS, Brian , HEBB, Jeffrey, Paul , DANIS, John
- 申请人： Axcelis Technologies, Inc.
- 申请人地址： 55 Cherry Hill Drive Beverly, MA 01915 US
- 专利权人： Axcelis Technologies, Inc.
- 当前专利权人： Axcelis Technologies, Inc.
- 当前专利权人地址： 55 Cherry Hill Drive Beverly, MA 01915 US
- 代理机构： Burke, Steven David
- 优先权： US670712 20000927
- 国际公布： WO02027059 20020404
- 主分类号： F27D19/00
- IPC分类号： F27D19/00 ; C30B25/16 ; C30B31/18 ; C23C16/52
摘要：
A system and method for processing a workpiece in a thermal processing furnace by measuring the temperature of the workpiece in the thermal processing furnace, and based upon an intended temperature profile and the measured temperature of the workpiece, moving the workpiece through the furnace to heat process the workpiece generally according to the intended temperature profile.
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