发明公开
EP1338371A4 LASER BEAM MACHINING METHOD AND LASER BEAM MACHINING DEVICE
有权
LASERSTRAHLBEARBEITUNGS-VERFAHREN UND LASERSTRAHLBEARBEITUNGS-VORRICHTUNG
- 专利标题: LASER BEAM MACHINING METHOD AND LASER BEAM MACHINING DEVICE
- 专利标题(中): LASERSTRAHLBEARBEITUNGS-VERFAHREN UND LASERSTRAHLBEARBEITUNGS-VORRICHTUNG
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申请号: EP01965620申请日: 2001-09-13
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公开(公告)号: EP1338371A4公开(公告)日: 2008-08-06
- 发明人: FUKUYO FUMITSUGU , FUKUMITSU KENSHI , UCHIYAMA NAOKI , WAKUDA TOSHIMITSU
- 申请人: HAMAMATSU PHOTONICS KK
- 专利权人: HAMAMATSU PHOTONICS KK
- 当前专利权人: HAMAMATSU PHOTONICS KK
- 优先权: JP2000278306 2000-09-13
- 主分类号: B28D5/00
- IPC分类号: B28D5/00 ; B23K26/073 ; B23K26/38 ; B23K101/40 ; C03B33/023 ; C03B33/08 ; C03B33/10 ; C03C23/00 ; G02F1/1368 ; H01L21/301 ; B23K26/00
摘要:
A laser beam machining method and a laser beam machining device capable of cutting a work without producing a fusing and a cracking out of a predetermined cutting line on the surface of the work, wherein a pulse laser beam (L) is radiated on the predetermined cut line (5) on the surface (3) of the work (1) under the conditions causing a multiple photon absorption and with a condensed point (P) aligned to the inside of the work (1), and a modified area is formed inside the work (1) along the predetermined cut line (5) by moving the condensed point (P) along the predetermined cut line (5), whereby the work (1) can be cut with a rather small force by cracking the work (1) along the predetermined cut line (5) starting from the modified area and, because the pulse laser beam (L) radiated is not almost absorbed onto the surface (3) of the work (1), the surface (3) is not fused even if the modified area is formed.
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