发明公开
- 专利标题： METHOD AND APPARATUS FOR SCANNED INSTRUMENT CALIBRATION
- 专利标题（中）： 方法和设备扫描仪校准
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申请号： EP02749692申请日： 2002-06-28
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公开(公告)号： EP1428006A4公开(公告)日： 2009-09-02
- 发明人: LEZEC HENRI J , MUSIL CHRISTIAN R
- 申请人： FEI CO
- 专利权人： FEI CO
- 当前专利权人： FEI CO
- 优先权： US26447201 2001-01-26; US30214201 2001-06-29
- 主分类号： C23C16/04
- IPC分类号： C23C16/04 ; G01N1/00 ; G01N23/225 ; G21K5/00 ; H01J37/147 ; H01J37/21 ; H01L21/02 ; H01L21/285
摘要：
Methods and apparatus for calibration of a scanned beam system (8) are provided by sampling a calibration specimen (22) containing an array of targets with a spacing between samples that is greater than the spacing between targets in an array and forming an image from the samples to reduce calibration specimen degradation and to magnify calibration errors to enable very fine calibration of the scanned beam system (8).
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