发明公开
- 专利标题: VIBRATING TYPE PRESSURE SENSOR
- 专利标题(中): DRUCKSENSOR DES VIBRATIONSTYPS
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申请号: EP03701810.8申请日: 2003-01-20
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公开(公告)号: EP1471340A1公开(公告)日: 2004-10-27
- 发明人: ESASHI, Masayoshi , HIRATA, Kaoru, c/o Fujikin Incorporated
- 申请人: Fujikin Incorporated , ESASHI, Masayoshi
- 申请人地址: 3-2, Itachibori 2-chome, Nishi-ku Osaka-shi, Osaka-fu 550-0012 JP
- 专利权人: Fujikin Incorporated,ESASHI, Masayoshi
- 当前专利权人: Fujikin Incorporated,ESASHI, Masayoshi
- 当前专利权人地址: 3-2, Itachibori 2-chome, Nishi-ku Osaka-shi, Osaka-fu 550-0012 JP
- 代理机构: Howson, Richard G.B.
- 优先权: JP2002011528 20020121
- 国际公布: WO2003062778 20030731
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A high-sensitive and high accuracy vibrating type pressure sensor (1) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm (4) for receiving a fluid pressure P on a rear surface side, the vibrator (12) formed on the front surface side of the pressure receiving diaphragm (4), a wall body (8) disposed so as to surround the periphery of the vibrator (12), and a permeable part (20) for light transmission for changing an internal space in which the vibrator (12) is present into a vacuum chamber (10) by closing an opening part (8a) in the wall body (8), whereby, since the diaphragm (4) is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator (12) and the vibrator is isolatedly disposed in the vacuum chamber (10), mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator (12) is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed A forced vibration means (57) can also be operated by piezo driving and electrostatic driving from the outside without generating noise.
公开/授权文献
- EP1471340B1 VIBRATING TYPE PRESSURE SENSOR 公开/授权日:2008-09-24
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