发明公开
EP1475684A4 ADVANCED PRESSURE TYPE FLOW CONTROL DEVICE
有权
VERBESSERTESTRÖMUNGUNGSSTEUEREINRICHTUNGDES DRUCKTYPS
- 专利标题: ADVANCED PRESSURE TYPE FLOW CONTROL DEVICE
- 专利标题(中): VERBESSERTESTRÖMUNGUNGSSTEUEREINRICHTUNGDES DRUCKTYPS
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申请号: EP02781829申请日: 2002-11-22
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公开(公告)号: EP1475684A4公开(公告)日: 2005-09-07
- 发明人: OHMI TADAHIRO , UNO TOMIO , NAKAMURA OSAMU , IKEDA NOBUKAZU , DOHI RYOUSUKE , NISHINO KOUJI , MATSUMOTO ATSUSHI , SUGIYAMA KAZUHIKO , INUI SHUJIRO , SAKAI TAIJI , UEYAMA MASANORI
- 申请人: FUJIKIN KK , TOKYO ELECTRON LTD
- 专利权人: FUJIKIN KK,TOKYO ELECTRON LTD
- 当前专利权人: FUJIKIN KK,TOKYO ELECTRON LTD
- 优先权: JP2001399433 2001-12-28
- 主分类号: G01F1/00
- IPC分类号: G01F1/00 ; G01F1/36 ; G01F1/42 ; G05D7/06
摘要:
An advanced pressure type flow control device capable of accurately controlling a flow by using an experimental flow expression established to accurately fit to the actual flow of compressible fluid in a non-critical area, wherein the experimental flow expression of the compressible fluid in the non-critical area non-sound velocity area is expressed as Qc = KP2m P1 - P2n, and the fluid flow passing through an orifice 4 is calculated by using the expression Qc = KP2m P1 - P2n K is a proportional constant, m and n are constants so that the flow can be accurately and rapidly controlled to a specified one, and a pressure ratio P2/P1 = r provided by an upstream side pressure P1 and a downstream side pressure P2 is always compared with a critical value rc and the flow is calculated by using an expression Qc = KP1 under the critical condition of r rc so that the flow can be accurately and rapidly controlled to the specified one in correspondence to all conditions of the fluid.
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