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    FLUID SUPPLY APPARATUS
    1.
    发明公开
    FLUID SUPPLY APPARATUS 有权
    FLUIDZUFUHRVORRICHTUNG

    公开(公告)号：EP0969342A4

    公开(公告)日：2004-05-19

    申请号：EP99900168

    申请日：1999-01-11

    申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD ,  OHMI TADAHIRO

    发明人： OHMI TADAHIRO ,  KAGAZUME TETU ,  SUGIYAMA KAZUHIKO ,  DOHI RYOUSUKE ,  MINAMI YUKIO ,  NISHINO KOUJI ,  KAWATA KOUJI ,  IKEDA NOBUKAZU ,  YAMAJI MICHIO

    IPC分类号： F16K31/06 ,  C01B5/00 ,  G05D7/06 ,  G05D11/13 ,  G05D21/00

    CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： A fluid supply apparatus comprising a pressure flow controller for controlling the rate of flow of fluid, a fluid selector valve for opening/closing the fluid passage on the secondary side, and a fluid supply controller for controlling the operation of them, wherein the pressure flow controller is provided with an orifice (5), a control valve (1) provided on the upstream side of the orifice (5), a pressure sensor (3) provided between the control valve (1) and the orifice (5), and an operation controller (6) for outputting to a driver (2) of the control valve (1) a control signal (Qy) representing the difference between a rate-of-flow signal (Qc=KP1) generated by calculation based on the pressure (P1) measured by the pressure sensor (3) and a rate-of-flow command signal (Qs), and the pressure (P1) on the upstream side of the orifice (5) is adjusted by opening/closing the control valve (1) so as to regulate the rate of flow on the downstream side of the orifice (5).

    摘要翻译： 1。一种流体供给装置，其特征在于，具有：控制流体的流量的压力流量控制器;开闭二次侧的流体通路的流体切换阀;以及控制它们的动作的流体供给控制器， （5），设置在节流孔（5）的上游侧的控制阀（1），设置在控制阀（1）和节流孔（5）之间的压力传感器（3），以及 （6），用于向控制阀（1）的驱动器（2）输出表示通过基于压力的计算产生的流量信号（Qc = KP1）之间的差值的控制信号（Qy） （3）测量的压力（P1）和流量指令信号（Qs），并且通过打开/关闭控制阀（5）来调节节流孔（5）上游侧的压力（P1） 1）以调节孔口（5）下游侧的流量。

    PIPE JOINT
    3.
    发明公开
    PIPE JOINT 有权
    ROHRVERBINDUNG

    公开(公告)号：EP1486715A4

    公开(公告)日：2006-03-08

    申请号：EP03710417

    申请日：2003-03-19

    申请人： TOKYO ELECTRON LTD ,  FUJIKIN KK

    发明人： SUGIYAMA KAZUHIKO ,  HADA KEIKO ,  IDETA EIJI ,  IKEDA NOBUKAZU ,  YASUMOTO NAOFUMI ,  YAMAJI MICHIO

    IPC分类号： F16L19/08 ,  F16L19/02 ,  F16L19/025 ,  F16L19/03 ,  F16L23/036 ,  F16L47/14 ,  F16L23/02

    CPC分类号： F16L19/0218 ,  F16L19/0225 ,  F16L19/025

    摘要： An annular recess portion (7) is provided in an end face of a synthetic resin-made first joint member (2) and an annular projection portion (8) is provided on an end face of a synthetic resin-made second joint member (3). The projection portion (8) is fitted into an opening portion of the recess portion (7) into which a synthetic resin-made gasket (4) is fitted. When a pipe joint(1) is tightened adequately, the inner face of the recess portion (7) of the first joint member (2) and the outer face of the projection portion (8) of the second joint member (3) are in close contact with each other over substantially the entire surface through the gasket (4), a portion (2d) located radially inside the recess portion in the end face of the first joint member (2) and a portion (3d) located radially inside the projection portion on the end face of the second joint member (3) are in close contact with each other over substantially the entire surface area, and a portion (2e) located radially outside the recess portion in the end face of the first joint member (2) and a portion (3e) located radially outside the projection portion on the end face of the second joint member (3) are also in contact with each other over substantially the entire surface area.

    摘要翻译： 在合成树脂制的第一接头部件（2）的端面设置环状的凹部（7），在合成树脂制的第二接头部件（3）的端面设置环状的凸部（8） ）。 突起部分（8）装配到凹入部分（7）的开口部分中，合成树脂制成的垫圈（4）装入该开口部分中。 当管接头（1）被适当地拧紧时，第一接头部件（2）的凹部（7）的内表面和第二接头部件（3）的凸部（8）的外表面处于 通过垫圈（4）在第一接头构件（2）的端面中的径向位于凹部的径向内侧的部分（2d）和位于第一接头构件（2）的径向内侧的部分（3d）的基本上整个表面上彼此紧密接触 在第二接头部件3的端面上的突起部分在大致整个表面区域上彼此紧密接触，并且在第一接头部件3的端面中位于凹口部分径向外侧的部分2e 2）和位于第二接头部件（3）的端面上的突出部分的径向外侧的部分（3e）也基本在整个表面区域彼此接触。

    PARALLEL BYPASS TYPE FLUID FEEDING DEVICE, AND METHOD AND DEVICE FOR CONTROLLING FLUID VARIABLE TYPE PRESSURE SYSTEM FLOW RATE USED FOR THE DEVICE
    4.
    发明公开
    PARALLEL BYPASS TYPE FLUID FEEDING DEVICE, AND METHOD AND DEVICE FOR CONTROLLING FLUID VARIABLE TYPE PRESSURE SYSTEM FLOW RATE USED FOR THE DEVICE 审中-公开
    旁路类型和调节压力系统与可变液体压力流量的方法和设备布置成平行液装置这FLÜSSIGLEITSSPEISEVORRICHTUNGUSED

    公开(公告)号：EP1096351A4

    公开(公告)日：2004-12-15

    申请号：EP00913087

    申请日：2000-04-03

    申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD ,  OHMI TADAHIRO

    发明人： OHMI TADAHIRO ,  KAGATSUME SATOSHI ,  SUGIYAMA KAZUHIKO ,  MINAMI YUKIO ,  NISHINO KOUJI ,  DOHI RYOUSUKE ,  YONEHANA KATSUNORI ,  IKEDA NOBUKAZU ,  YAMAJI MICHIO ,  HIROSE JUN ,  FUKAZAWA KAZUO ,  KOIZUMI HIROSHI ,  NAGAOKA HIDEKI ,  MORIMOTO AKIHIRO ,  UNO TOMIO ,  IDETA EIJI ,  MATSUMOTO ATSUSHI ,  UENOYAMA TOYOMI ,  HIROSE TAKASHI

    IPC分类号： G05D7/06

    CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

    摘要： A fluid feeding device having a plurality of flow paths disposed in parallel with each other starting at a regulator for pressure regulation, wherein a mass flow controller for flow control or a pressure system flow control device is disposed in each flow path so that the opening and closing operations for fluid supply in each flow path do not provide a transient variation in a stable supply to the other flow paths and, when the fluid supply in a flow path is changed from close to open, a set flow rate is reached a specified delay time after the start of the operation of the mass flow controller in that flow path.

    摘要翻译： 用的流线从一个调节器，用于压力调整分支出来的多个流体供给装置中，流线平行地布置，worin的量度取，DASS模具手术，也就是，开口或一个流路的开闭将没有 在其它流动通道的稳流瞬态效应。 为了这个目的，每个流动通道设置有一个时间延迟型质量流量控制器MFC所以没有当一个封闭流体通道打开时，质量流量控制器上没有流动通道达在一个特定的延迟时间ΔT的一组流量Qs 从起点。 这样提供了一种方法和用于其中的气体类型的多元性可与精度高流速通过一个压力式流量控制装置来控制上述装置的速率。为了做到端，用于计算气体的流动的公式 理论上推导做了与压力比不低于临界压力比更高流动。 从做过公式，则流程因数被定义，所以做了式可以被应用到许多用流动因素气体类型。 该方法包括：在下游侧计算通过传递到孔口雅丁式QC = KP1（K =常数）具有压力P1的气体的QC流量上设置节流孔上游侧的两次或更多次高于压力P2 ，worin流量因数FF为每种气体的计算如下： FF =（K /伽马S）A2 /（卡帕+ 1）U <1 /（卡帕-1）>是κ/ A（卡帕 + 1）RUU <1.2> 和worin，如果气体类型A的计算的流速是QA，并且，当将B型气体被允许在相同的压力下，通过相同的孔中流动的上游侧 并在上游侧相同的温度，流率QB的计算公式如下： QB =（FFB / FFA）QA 其中YS =标准状态的气体的浓度; Kappa值=气体的比热的比值; R为气体的=常数; K =比例常数不依赖于气体的类型; FFA =气体类型A的流动系数; 气体类型B. 的和FFB =流量系数

    FLOW CONTROL METHOD FOR CLUSTERING FLUID AND FLOW CONTROL DEVICE FOR CLUSTERING FLUID
    5.
    发明公开
    FLOW CONTROL METHOD FOR CLUSTERING FLUID AND FLOW CONTROL DEVICE FOR CLUSTERING FLUID 审中-公开
    FLUSSSTEUERVERFAHREN ZUR FLUIDCLUSTERUNG UND FLUSSSTEUEREINRICHTUNG ZUR FLUIDCLUSTERUNG

    公开(公告)号：EP1585002A4

    公开(公告)日：2006-04-26

    申请号：EP04702837

    申请日：2004-01-16

    申请人： FUJIKIN KK ,  OHMI TADAHIRO ,  TOKYO ELECTRON LTD

    发明人： OHMI TADAHIRO ,  SUGIYAMA KAZUHIKO ,  MIZUSAWA KENETU ,  TAKAHASHI EIJI ,  UNO TOMIO ,  NISHINO KOUJI ,  DOHI RYOUSUKE ,  IKEDA NOBUKAZU ,  NAGASE MASAAKI

    IPC分类号： G05D7/06 ,  H01L21/00 ,  H01L21/306

    CPC分类号： H01L21/67023 ,  G05D7/0635 ,  Y10T137/6416 ,  Y10T137/6606 ,  Y10T137/7761

    摘要： A pressure-type flow control device is used to permit a high-accuracy control of the flow rate of a clustering fluid such as HF gas to be supplied to a vacuum chamber or the like within a flow rate range of about 3-300 SCCM. Specifically, a method of controlling the flow rate of a clustering fluid that uses a pressure-type flow control device where a flow rate Q of a gas flowing through an orifice is computed as Q=KP1 (K is constant) with a ratio P2/P1 between an orifice-upstream-side gas pressure P1 and a downstream-side gas pressure P2 kept up to the critical pressure ratio of the gas, wherein the pressure-type flow control device is heated to at least 40°C, or the clustering fluid is added with a dilute gas to be kept at up to a partial pressure, thereby allowing the clustering fluid, produced by dissociating the association of molecules and then keeping them in a monomolecular state, to flow through the orifice.

    摘要翻译： 使用压力式流量控制装置，可以在3×300SCCM的流量范围内对供应到真空室等的HF气体等聚集流体进行高精度流量控制。 具体地说，本文公开了使用压力型流量控制装置来控制聚集流体的流量的方法，其中通过孔口的气体的流量Q被计算为K = KP1（其中K 是常数），气体处于孔口上游侧的气体压力P1与孔口下游侧的气体压力P2之间的比P2 / P1保持在不高于 通过将上述压力式流量控制装置加热至高于40℃的温度，或者通过将稀释气体施加到聚集流体以使其低于 分压使得聚簇流体被允许以单分子状态通过上述孔口。

    ADVANCED PRESSURE TYPE FLOW CONTROL DEVICE
    6.
    发明公开
    ADVANCED PRESSURE TYPE FLOW CONTROL DEVICE 有权
    VERBESSERTESTRÖMUNGUNGSSTEUEREINRICHTUNGDES DRUCKTYPS

    公开(公告)号：EP1475684A4

    公开(公告)日：2005-09-07

    申请号：EP02781829

    申请日：2002-11-22

    申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD

    发明人： OHMI TADAHIRO ,  UNO TOMIO ,  NAKAMURA OSAMU ,  IKEDA NOBUKAZU ,  DOHI RYOUSUKE ,  NISHINO KOUJI ,  MATSUMOTO ATSUSHI ,  SUGIYAMA KAZUHIKO ,  INUI SHUJIRO ,  SAKAI TAIJI ,  UEYAMA MASANORI

    IPC分类号： G01F1/00 ,  G01F1/36 ,  G01F1/42 ,  G05D7/06

    CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

    摘要： An advanced pressure type flow control device capable of accurately controlling a flow by using an experimental flow expression established to accurately fit to the actual flow of compressible fluid in a non-critical area, wherein the experimental flow expression of the compressible fluid in the non-critical area non-sound velocity area is expressed as Qc = KP2m P1 - P2n, and the fluid flow passing through an orifice 4 is calculated by using the expression Qc = KP2m P1 - P2n K is a proportional constant, m and n are constants so that the flow can be accurately and rapidly controlled to a specified one, and a pressure ratio P2/P1 = r provided by an upstream side pressure P1 and a downstream side pressure P2 is always compared with a critical value rc and the flow is calculated by using an expression Qc = KP1 under the critical condition of r rc so that the flow can be accurately and rapidly controlled to the specified one in correspondence to all conditions of the fluid.

    摘要翻译： 一种先进的压力型流量控制装置，其能够通过使用所建立的实验流量表达准确地控制流量，所述实验流量表达准确地适应非临界区域中的可压缩流体的实际流量，其中， 临界区域非声速区域表示为Qc = KP2mP1-P2n，并且通过节流孔4的流体流量通过使用以下表达式来计算Qc = KP2m P1-P2n K是比例常数，m和n是常数 可以将流量精确而快速地控制到特定的流量，并且总是将由上游侧压力P1和下游侧压力P2提供的压力比P2 / P1 = r与临界值rc进行比较，并且通过 在r rc的非临界条件下使用表达式Qc = KP2m P1-P2n，从而可以将流量精确且快速地控制为 指定的一个对应于流体的所有条件。