公开(公告)号：EP1475684A4

公开(公告)日：2005-09-07

申请号：EP02781829

申请日：2002-11-22

申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD

发明人： OHMI TADAHIRO ,  UNO TOMIO ,  NAKAMURA OSAMU ,  IKEDA NOBUKAZU ,  DOHI RYOUSUKE ,  NISHINO KOUJI ,  MATSUMOTO ATSUSHI ,  SUGIYAMA KAZUHIKO ,  INUI SHUJIRO ,  SAKAI TAIJI ,  UEYAMA MASANORI

IPC分类号： G01F1/00 ,  G01F1/36 ,  G01F1/42 ,  G05D7/06

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： An advanced pressure type flow control device capable of accurately controlling a flow by using an experimental flow expression established to accurately fit to the actual flow of compressible fluid in a non-critical area, wherein the experimental flow expression of the compressible fluid in the non-critical area non-sound velocity area is expressed as Qc = KP2m P1 - P2n, and the fluid flow passing through an orifice 4 is calculated by using the expression Qc = KP2m P1 - P2n K is a proportional constant, m and n are constants so that the flow can be accurately and rapidly controlled to a specified one, and a pressure ratio P2/P1 = r provided by an upstream side pressure P1 and a downstream side pressure P2 is always compared with a critical value rc and the flow is calculated by using an expression Qc = KP1 under the critical condition of r rc so that the flow can be accurately and rapidly controlled to the specified one in correspondence to all conditions of the fluid.

摘要翻译： 一种先进的压力型流量控制装置，其能够通过使用所建立的实验流量表达准确地控制流量，所述实验流量表达准确地适应非临界区域中的可压缩流体的实际流量，其中， 临界区域非声速区域表示为Qc = KP2mP1-P2n，并且通过节流孔4的流体流量通过使用以下表达式来计算Qc = KP2m P1-P2n K是比例常数，m和n是常数 可以将流量精确而快速地控制到特定的流量，并且总是将由上游侧压力P1和下游侧压力P2提供的压力比P2 / P1 = r与临界值rc进行比较，并且通过 在r rc的非临界条件下使用表达式Qc = KP2m P1-P2n，从而可以将流量精确且快速地控制为 指定的一个对应于流体的所有条件。