发明公开
- 专利标题: OPTICAL SYSTEM WITH BIREFRINGENT OPTICAL ELEMENTS
- 专利标题(中): 带双折射光学元件光学系统
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申请号: EP02779537.6申请日: 2002-11-07
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公开(公告)号: EP1483616A1公开(公告)日: 2004-12-08
- 发明人: FIOLKA, Damian , DITTMAN, Olaf , TOTZECK, Michael , DIECKMANN, Nils , KÖHLER, Jess , GRUNER, Toralf , KRÄHMER, Daniel
- 申请人: Carl Zeiss SMT AG
- 申请人地址: Carl-Zeiss-Strasse 22 73447 Oberkochen DE
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: Carl-Zeiss-Strasse 22 73447 Oberkochen DE
- 代理机构: Müller-Rissmann, Werner Albrecht, Dr.
- 优先权: DE10211762 20020314
- 国际公布: WO2003077011 20030918
- 主分类号: G02B27/28
- IPC分类号: G02B27/28 ; G02B5/30 ; G02B13/14 ; G03F7/20
摘要:
Optical system (1) : with a first optical subsystem (3) comprising at least a first birefringent optical element (7), with a second optical subsystem (5) comprising at least a second birefringent optical element (9), wherein between the first optical subsystem and the second optical subsystem an optical retarding system (13) with at least a first optical retarding element (15) is arranged, which introduces a ratardation of one-half of a wavelength between two mutually orthogonal states of polarization.
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