发明公开
- 专利标题: PRODUCTION METHOD FOR COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
- 专利标题(中): 用于生产化合物半导体单晶
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申请号: EP02786108申请日: 2002-12-17
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公开(公告)号: EP1500633A4公开(公告)日: 2007-10-24
- 发明人: ASAHI TOSHIAKI , SATO KENJI , ARAKAWA ATSUTOSHI
- 申请人: NIPPON MINING CO
- 专利权人: NIPPON MINING CO
- 当前专利权人: NIPPON MINING CO
- 优先权: JP2002035551 2002-02-13; JP2002208530 2002-07-17; JP2002249963 2002-08-29
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B15/12 ; C30B27/02 ; C30B29/48 ; C03B15/12
摘要:
A method for producing a compound semiconductor single crystal by a liquid encapsulated Czochralski method, including containing a semiconductor raw material and an encapsulating material in a raw material melt-containing portion having a first crucible having a bottom and a cylindrical shape and a second crucible disposed within the first crucible and having a communication hole communicating with the first crucible in a bottom portion thereof; melting the raw material by heating the raw material melt-containing portion; and growing a crystal by making a seed crystal contact with a surface of the raw material melt in a state covered with the encapsulating material and by pulling up the seed crystal. A heater temperature is controlled so that a diameter of a growing crystal becomes approximately equal to an inner diameter of the second crucible, and the crystal is grown by maintaining a surface of the growing crystal in a state covered with the encapsulating material until termination of crystal growth.
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