发明授权
- 专利标题: VACUUMARCQUELLE MIT MAGNETFELDERZEUGUNGSEINRICHTUNG
- 专利标题(英): Vacuum arc source comprising a device for generating a magnetic field
- 专利标题(中): 随磁场发生装置VACUUMARCQUELLE
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申请号: EP03753214.0申请日: 2003-10-30
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公开(公告)号: EP1576641B8公开(公告)日: 2007-10-17
- 发明人: SCHÜTZE, Andreas , WOHLRAB, Christian
- 申请人: Oerlikon Trading AG, Trübbach
- 申请人地址: 9477 Trübbach CH
- 专利权人: Oerlikon Trading AG, Trübbach
- 当前专利权人: Oerlikon Trading AG, Trübbach
- 当前专利权人地址: 9477 Trübbach CH
- 优先权: CH216302 20021219
- 国际公布: WO2004057642 20040708
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; C23C14/32
摘要:
The invention relates to a vacuum arc source and to a method for operating the same, said source comprising a target with a surface for operating an arc discharge. The target is arranged in the range of influence of a device for generating a magnetic field, said device comprising at least two magnetic systems of opposite polarity and being embodied in such a way that the component B⊥ which is perpendicular to the surface and pertains to the resulting magnetic field has essentially constantly low values over a large part of the surface or has a value equal to zero.
公开/授权文献
- EP1576641B1 VACUUMARCQUELLE MIT MAGNETFELDERZEUGUNGSEINRICHTUNG 公开/授权日:2007-09-05
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