摘要:
The invention relates to a vacuum arc source and to a method for operating the same, said source comprising a target with a surface for operating an arc discharge. The target is arranged in the range of influence of a device for generating a magnetic field, said device comprising at least two magnetic systems of opposite polarity and being embodied in such a way that the component B⊥ which is perpendicular to the surface and pertains to the resulting magnetic field has essentially constantly low values over a large part of the surface or has a value equal to zero.
摘要:
A vacuum coating unit contains a reactive gas inlet (12), at least one PVD coating source (8, 21) having a sheet-like cathode (11) and a substrate carrier (6) containing a plurality of substrates (7), where the substrate carrier (6) forms a two-dimensional horizontal extension and is positioned between at least two PVD coating sources and the plurality of substrates (7) are cutting tools having at least one cutting edge (E) in the peripheral region of the sheet-like substrate (7) and are distributed in a plane of the two-dimensional extension of the substrate carrier (6), where the substrate carrier (6) is positioned in a horizontal plane (3) in the vacuum process chamber (1) at a spacing between the sheet-like cathodes (11) of the at least two PVD coating sources (8, 21) in such a way that at least a part of each of the at least one cutting edge (E) contains an active cutting edge (E') which is at all times exposed in direct line of sight to at least one of the cathodes (11) of the PVD coating sources (8, 21).
摘要:
A PVD layer system for coating workpieces comprises at least one mixed crystal layer of a polyoxide with the following composition: (Me1 1-xMe2x)2O3. Me1 and Me2 are at least one of the elements Al, Cr, Fe, Li, Mg, Mn, Nb, Ti, Sb or V. The elements of Me1 and Me2 are each different. The crystal lattice of the mixed crystal layer in the PVD layer system has a corundum structure, which is characterized by at least three lines associated with the corundum structure in a spectrum of the mixed crystal layer, measured by means of X-ray diffractometry. A vacuum deposition method for the production of a mixed crystal layer of a polyoxide and accordingly coated tools and components are also disclosed.
摘要:
The invention relates to a method for operating an arc source, wherein an electric spark discharge is ignited or operated on a surface of a target (5) and the spark discharge is simultaneously supplied with a direct current, with which a direct voltage is associated, and with a pulse current generated by a periodically applied voltage signal. The voltage is increased at the arc source for several microseconds, or the signal wave form of the voltage signal is substantially freely adjustable.
摘要:
The invention provides a single or a multilayer PVD coated sharp edged cutting tool, which can at the same time exhibit satisfactory wear and thermochemical resistance as well as resistance to edge chipping. The cutting tool comprises a sintered body made of a cemented carbide, a CBN, a cermet or a ceramic material having a cutting edge with an edge radius Re, a flank and a rake face and a multilayer coating consisting of a PVD coating comprising at least one oxidic PVD layer covering at least parts of the surface of the sintered body. In one embodiment the edge radius Re is smaller than 40 μm, preferably smaller than or equal to 30 μm. The covered parts of the surface preferably comprise at least some parts of the sharp edge of the sintered body.
摘要:
Method for producing layers of low conductivity, especially insulating layers, on at least one workpiece by vacuum coating, wherein an electrical arc discharge is operated between at least one anode and one cathode of an arc source in an atmosphere containing reactive gas, and only a small external magnetic field or none at all is produced at the surface of a target electrically connected to the cathode essentially perpendicular to the target surface to assist the vaporization process, the degree of recoating of the surface by other coating sources being less than 10%, and the magnetic field is generated by a magnet system that comprises at least one axially polarized coil with a geometry similar in size to the target.