发明授权
- 专利标题： METHOD AND APPARATUS FOR SIMULTANEOUS 2-D AND TOPOGRAPHICAL INSPECTION
- 专利标题（中）： 方法和设备同步2D和地形的调查
-
申请号： EP04701074.9申请日： 2004-01-09
-
公开(公告)号： EP1581781B1公开(公告)日： 2011-09-21
- 发明人: TOKER, Gregory , BRUNFELD, Andrei , LUTSKER, Ilia
- 申请人： ORBOTECH LTD.
- 申请人地址： P.O. Box 215 Yavne 81102 IL
- 专利权人： ORBOTECH LTD.
- 当前专利权人： ORBOTECH LTD.
- 当前专利权人地址： P.O. Box 215 Yavne 81102 IL
- 代理机构： White, Duncan Rohan
- 优先权： US438783P 20030109
- 国际公布： WO2004063668 20040729
- 主分类号： G01N21/88
- IPC分类号： G01N21/88 ; G01N21/956
摘要：
Apparatus for sensing information regarding a surface (12) including a first plurality of optical elements (50, 70, 74, 53, 80, 84, 54, 60) arranged to acquire two dimensional information (20) about a surface (12), a second plurality of optical elements (90, 42, 94) arranged to acquire topographical information (22) about the surface (12), wherein the first plurality (50, 70, 74, 53, 80, 84, 54, 60) and the second plurality of optical elements (90, 42, 94) are arranged to simultaneously provide the two dimensional information (20) and the topographical information (22) to at least partially non-overlapping portions of a single sensor array (14).
公开/授权文献
信息查询
