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公开(公告)号：EP1581781A2
公开(公告)日：2005-10-05
申请号：EP04701074.9
申请日：2004-01-09
申请人： ORBOTECH LTD.
发明人： TOKER, Gregory , BRUNFELD, Andrei , LUTSKER, Ilia
IPC分类号： G01C1/00
CPC分类号： G01N21/8806 , G01N21/95684 , G01N2021/1772 , G01N2021/1785 , G01N2021/8887 , G01N2201/06113
摘要： Apparatus for sensing information regarding a surface (12) including a first plurality of optical elements (50, 70, 74, 53, 80, 84, 54, 60) arranged to acquire two dimensional information (20) about a surface (12), a second plurality of optical elements (90, 42, 94) arranged to acquire topographical information (22) about the surface (12), wherein the first plurality (50, 70, 74, 53, 80, 84, 54, 60) and the second plurality of optical elements (90, 42, 94) are arranged to simultaneously provide the two dimensional information (20) and the topographical information (22) to at least partially non-overlapping portions of a single sensor array (14).
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公开(公告)号：EP1581781B1
公开(公告)日：2011-09-21
申请号：EP04701074.9
申请日：2004-01-09
申请人： ORBOTECH LTD.
发明人： TOKER, Gregory , BRUNFELD, Andrei , LUTSKER, Ilia
IPC分类号： G01N21/88 , G01N21/956
CPC分类号： G01N21/8806 , G01N21/95684 , G01N2021/1772 , G01N2021/1785 , G01N2021/8887 , G01N2201/06113
摘要： Apparatus for sensing information regarding a surface (12) including a first plurality of optical elements (50, 70, 74, 53, 80, 84, 54, 60) arranged to acquire two dimensional information (20) about a surface (12), a second plurality of optical elements (90, 42, 94) arranged to acquire topographical information (22) about the surface (12), wherein the first plurality (50, 70, 74, 53, 80, 84, 54, 60) and the second plurality of optical elements (90, 42, 94) are arranged to simultaneously provide the two dimensional information (20) and the topographical information (22) to at least partially non-overlapping portions of a single sensor array (14).
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3.发明公开
公开(公告)号：EP1581781A3
公开(公告)日：2005-11-02
申请号：EP04701074.9
申请日：2004-01-09
申请人： ORBOTECH LTD.
发明人： TOKER, Gregory , BRUNFELD, Andrei , LUTSKER, Ilia
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