发明授权
EP1631809B1 VERFAHREN ZUR BESTIMMUNG DER ABBILDUNGSGÜTE EINES OPTISCHEN ABBILDUNGSSYSTEMS 有权
VERFAHREN ZUR BESTIMMUNG DERABBILDUNGSGÜTEEINES OPTISCHEN ABBILDUNGSSYSTEMS

  • 专利标题: VERFAHREN ZUR BESTIMMUNG DER ABBILDUNGSGÜTE EINES OPTISCHEN ABBILDUNGSSYSTEMS
  • 专利标题(英): Method for determining the image quality of an optical imaging system
  • 专利标题(中): VERFAHREN ZUR BESTIMMUNG DERABBILDUNGSGÜTEEINES OPTISCHEN ABBILDUNGSSYSTEMS
  • 申请号: EP04739798.9
    申请日: 2004-06-11
  • 公开(公告)号: EP1631809B1
    公开(公告)日: 2006-11-29
  • 发明人: ENGEL, ThomasGROSS, Herbert
  • 申请人: Carl Zeiss SMS GmbH
  • 申请人地址: Carl-Zeiss-Promenade 10 07745 Jena DE
  • 专利权人: Carl Zeiss SMS GmbH
  • 当前专利权人: Carl Zeiss SMS GmbH
  • 当前专利权人地址: Carl-Zeiss-Promenade 10 07745 Jena DE
  • 优先权: DE10327019 20030612
  • 国际公布: WO2004111600 20041223
  • 主分类号: G01M11/02
  • IPC分类号: G01M11/02
VERFAHREN ZUR BESTIMMUNG DER ABBILDUNGSGÜTE EINES OPTISCHEN ABBILDUNGSSYSTEMS
摘要:
The invention relates to a method for determining the image quality of an optical imaging system and to the use of the inventive method for determining the influence of samples on the amplitude distribution and on the phase front distribution of the illuminating light of which the amplitude distribution, in particular, is known. The invention comprises the following steps: adjusting the subassemblies relative to one another whereby making it possible to project images of a sample onto the detection device; recording a number of images of the sample from different planes of reference near the best focus plane; improving the image quality by image processing, particularly by reducing the noise in order to compare local sensitivity differences of the detection device and to center the intensity concentration points at a predetermined location in the images; computational linking of locally resolved image information, of the set values and system values related to the optical imaging system, and of information concerning the sample with the aim of determining characteristic numbers that are characteristic of the wave front deformation caused by the imaging system, and; outputting the characteristic numbers and assigning them to the imaging system in order to describe the image quality.
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