公开(公告)号：EP1399771B1

公开(公告)日：2006-07-26

申请号：EP02747433.7

申请日：2002-06-26

申请人： Carl Zeiss SMS GmbH

发明人： ENGEL, Thomas ,  HARNISCH, Wolfgang ,  HEISE, Jürgen

IPC分类号： G02B21/06

CPC分类号： G02B21/06 ,  Y10S385/901

摘要： The invention relates to a device for flat illumination of an object field in an optical apparatus and to an optical apparatus having said device, said optical apparatus being, for example, microscopes, including microlithography simulation microscopes, wherein a flat illumination, i.e. extending over a singular object point, of the object to be examined is required. The device comprises a laser light source (8) and a fiber optic cable (9) having at least one optic fiber through which the light is guided from the laser light source (8) to the object field. The optic fiber is configured and designed in such a way that the intensity of the illumination light is increasingly homogenized in the cross section of the optical fiber during its course from the end on the incidence side to the end on the radiation side and the illumination light from the end on the radiation side of optical fiber is directed to the object (O) with substantially homogenous intensity distribution.

公开(公告)号：EP1446813B1

公开(公告)日：2010-11-10

申请号：EP03740130.4

申请日：2003-05-08

申请人： Carl Zeiss SMT AG ,  Carl Zeiss SMS GmbH

发明人： MANN, Hans-Jürgen ,  DINGER, Udo ,  ULRICH, Wilhelm ,  REINECKE, Wolfgang ,  ENGEL, Thomas ,  ZIBOLD, Axel ,  HARNISCH, Wolfgang ,  WEDOWSKI, Marco ,  PAUSCHINGER, Dieter

IPC分类号： G21K7/00 ,  G21K1/06

CPC分类号： G21K7/00 ,  B82Y10/00 ,  G21K1/062

摘要： The invention relates to a reflective X-ray microscope for examining an object on an object plane wherein the object is illuminated with radiation at a wavelength of

公开(公告)号：EP1680699A1

公开(公告)日：2006-07-19

申请号：EP04797515.6

申请日：2004-11-02

申请人： Carl Zeiss SMS GmbH

发明人： BÖHM, Klaus ,  SCHÄFFER, Peter ,  HARNISCH, Wolfgang ,  ENGEL, Thomas ,  ZIBOLD, Axel ,  GEH, Bernd

IPC分类号： G02B26/00 ,  G02B5/00 ,  G02B26/08

CPC分类号： G03F7/701 ,  G02B5/005 ,  G02B21/24 ,  G02B26/007

摘要： The invention relates to the use of two-dimensional arrays comprising individually triggerable elements for creating diaphragms in beam paths of optical devices. At least one two-dimensional array comprising individually triggerable elements for creating diaphragms and/or filters is disposed in the optical imaging and/or illuminating beam path of the diaphragm array and/or filter array for optical devices, the shape, position, and/or optical properties of which can be modified, and is connected to a control unit for triggering the individual elements. The inventive technical solution allows diaphragms and/or filters to be modified very quickly regarding the geometry, optical properties, and/or position thereof by electronically triggering the same. Said modifications can also be done online as an optical fine-tuning step during the measurement and adjustment process. Furthermore, using said systems makes it possible to dispense with the expensive and time-consuming production of diaphragms having geometrical shapes.

公开(公告)号：EP1631809B1

公开(公告)日：2006-11-29

申请号：EP04739798.9

申请日：2004-06-11

申请人： Carl Zeiss SMS GmbH

发明人： ENGEL, Thomas ,  GROSS, Herbert

IPC分类号： G01M11/02

CPC分类号： G01M11/0257

摘要： The invention relates to a method for determining the image quality of an optical imaging system and to the use of the inventive method for determining the influence of samples on the amplitude distribution and on the phase front distribution of the illuminating light of which the amplitude distribution, in particular, is known. The invention comprises the following steps: adjusting the subassemblies relative to one another whereby making it possible to project images of a sample onto the detection device; recording a number of images of the sample from different planes of reference near the best focus plane; improving the image quality by image processing, particularly by reducing the noise in order to compare local sensitivity differences of the detection device and to center the intensity concentration points at a predetermined location in the images; computational linking of locally resolved image information, of the set values and system values related to the optical imaging system, and of information concerning the sample with the aim of determining characteristic numbers that are characteristic of the wave front deformation caused by the imaging system, and; outputting the characteristic numbers and assigning them to the imaging system in order to describe the image quality.

摘要翻译： 本发明涉及一种用于确定光学成像系统的图像质量的方法以及本发明的方法用于确定样本对幅度分布和照明光的相位正面分布的影响，其幅度分布， 特别是已知的。 本发明包括以下步骤：相对于彼此调整子组件，从而使得能够将样本的图像投影到检测装置上; 在最佳聚焦平面附近从不同参考平面记录样本的多个图像; 通过图像处理改善图像质量，特别是通过降低噪声以比较检测装置的局部灵敏度差异并将强度集中点居中在图像中的预定位置处; 计算局部解析的图像信息的计算链接，与光学成像系统有关的设定值和系统值以及与样本有关的信息的计算链接，目的是确定成像系统引起的波阵面变形的特征数字，以及 ; 输出特征数并将它们分配给成像系统以描述图像质量。

公开(公告)号：EP1631809A1

公开(公告)日：2006-03-08

申请号：EP04739798.9

申请日：2004-06-11

申请人： Carl Zeiss SMS GmbH

发明人： ENGEL, Thomas ,  GROSS, Herbert

IPC分类号： G01M11/02

CPC分类号： G01M11/0257

摘要： The invention relates to a method for determining the image quality of an optical imaging system and to the use of the inventive method for determining the influence of samples on the amplitude distribution and on the phase front distribution of the illuminating light of which the amplitude distribution, in particular, is known. The invention comprises the following steps: adjusting the subassemblies relative to one another whereby making it possible to project images of a sample onto the detection device; recording a number of images of the sample from different planes of reference near the best focus plane; improving the image quality by image processing, particularly by reducing the noise in order to compare local sensitivity differences of the detection device and to center the intensity concentration points at a predetermined location in the images; computational linking of locally resolved image information, of the set values and system values related to the optical imaging system, and of information concerning the sample with the aim of determining characteristic numbers that are characteristic of the wave front deformation caused by the imaging system, and; outputting the characteristic numbers and assigning them to the imaging system in order to describe the image quality.

公开(公告)号：EP1529245A1

公开(公告)日：2005-05-11

申请号：EP03762666.0

申请日：2003-07-09

申请人： Carl Zeiss SMS GmbH ,  Carl Zeiss NTS GmbH

发明人： ENGEL, Thomas ,  HARNISCH, Wolfgang ,  HOFFROGGE, Peter ,  ZIBOLD, Axel

IPC分类号： G03F1/00 ,  G03F7/20

CPC分类号： G03F1/72 ,  G03F1/84

摘要： The invention relates to an arrangement and method for the production of photomasks, whereby at least one defect control system is connected to at least one repair system via a stationary data link or an on-line link and the defect control system and the repair system are connected to each other data-wise in such a way that results obtained on one of the systems are directly available for reprocessing on the other system. The defect control system transmits defects, which are determined, to the repair system via a data link for data exchange. Said repair system controls the repair process according to the defects thus determined. An AIMS is advantageously provided as a defect control system, in addition to an electron beam system for defect control.

公开(公告)号：EP1373961B1

公开(公告)日：2006-01-04

申请号：EP02787138.3

申请日：2002-07-19

申请人： Carl Zeiss SMS GmbH

发明人： ENGEL, Thomas

IPC分类号： G02B21/02 ,  G02B21/36

CPC分类号： G02B21/02 ,  G02B21/362

摘要： A microscope lens arrangement consisting of a microscope lens (1) which can be placed in a working position in such a way that a sample (7) arranged in the field of view of said microscope lens (1) can be detected . A video camera (12; 22; 25; 32) which is coupled to the microscope lens (1) is provided. Said video camera can detect at least one part of the field of view without the aid of the lens when the microscope lens (1) is in a working position.

公开(公告)号：EP1407308B1

公开(公告)日：2005-12-07

申请号：EP02754671.2

申请日：2002-06-13

申请人： Carl Zeiss SMS GmbH

发明人： ENGEL, Thomas

IPC分类号： G02B21/02 ,  G02B21/06 ,  G02B21/36 ,  G02B21/24 ,  G02B9/04

CPC分类号： G02B21/361 ,  G01B9/04 ,  G02B21/02 ,  G02B21/06 ,  G02B21/248

摘要： The invention relates to a microscope lens (1) comprising a housing (2) that can be connected to a lens holder of a microscope and that has a light admission opening (6) and comprising an optics system (8) that is located in the housing (2). Said lens is provided with an image recording element (19). According to the invention, incident light is guided via the light admission opening (6) onto the image recording element (9) by means of the optics system (8) and is not coupled into the optical path of the microscope, located below the microscope lens.