发明授权
EP1665371B1 VERFAHREN ZUR HERSTELLUNG EINER MULTIFUNKTIONELLEN DIELEKTRIKUMSSCHICHT AUF EINEM SUBSTRAT
有权
制造方法的多功能电介质ON A SUBSTRATE
- 专利标题： VERFAHREN ZUR HERSTELLUNG EINER MULTIFUNKTIONELLEN DIELEKTRIKUMSSCHICHT AUF EINEM SUBSTRAT
- 专利标题（英）： Method for producing a multifunctional dielectric layer on a substrate
- 专利标题（中）： 制造方法的多功能电介质ON A SUBSTRATE
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申请号： EP04762735.1申请日： 2004-09-03
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公开(公告)号： EP1665371B1公开(公告)日： 2007-03-07
- 发明人: HELNEDER, Johann , SCHWERD, Markus , GOEBEL, Thomas , MITCHELL, Andrea , KOERNER, Heinrich , HOMMEL, Martina
- 申请人： Infineon Technologies AG
- 申请人地址： St.-Martin-Strasse 53 81669 München DE
- 专利权人： Infineon Technologies AG
- 当前专利权人： Infineon Technologies AG
- 当前专利权人地址： St.-Martin-Strasse 53 81669 München DE
- 代理机构： Lippert, Stachow & Partner
- 优先权： DE10344389 20030925
- 国际公布： WO2005031854 20050407
- 主分类号： H01L21/768
- IPC分类号： H01L21/768 ; H01L23/532
摘要：
The invention relates to a method for producing a multifunctional dielectric layer on a substrate, especially on an exposed metallic strip conductor system on a substrate. The aim of the invention is to provide a method for producing a multifunctional passivation layer for copper strip conductors that is easy to carry out and that provides improved electromigration, stress migration and improved adhesion. According to the invention, this aim is achieved by depositing an additional metal layer (5) across the surface of the exposed metal strip conductors (3). Said metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.
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