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1.发明授权VERFAHREN ZUR HERSTELLUNG EINER MULTIFUNKTIONELLEN DIELEKTRIKUMSSCHICHT AUF EINEM SUBSTRAT 有权制造方法的多功能电介质ON A SUBSTRATE
公开(公告)号：EP1665371B1
公开(公告)日：2007-03-07
申请号：EP04762735.1
申请日：2004-09-03
发明人： HELNEDER, Johann , SCHWERD, Markus , GOEBEL, Thomas , MITCHELL, Andrea , KOERNER, Heinrich , HOMMEL, Martina
IPC分类号： H01L21/768 , H01L23/532
CPC分类号： H01L23/53238 , C23C14/22 , C23C16/44 , H01L21/76834 , H01L21/76888 , H01L23/5228 , H01L23/53223 , H01L2924/0002 , H01L2924/00
摘要： The invention relates to a method for producing a multifunctional dielectric layer on a substrate, especially on an exposed metallic strip conductor system on a substrate. The aim of the invention is to provide a method for producing a multifunctional passivation layer for copper strip conductors that is easy to carry out and that provides improved electromigration, stress migration and improved adhesion. According to the invention, this aim is achieved by depositing an additional metal layer (5) across the surface of the exposed metal strip conductors (3). Said metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.
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2.发明公开VERFAHREN ZUR HERSTELLUNG EINER MULTIFUNKTIONELLEN DIELEKTRIKUMSSCHICHT AUF EINEM SUBSTRAT 有权制造方法的多功能电介质ON A SUBSTRATE
公开(公告)号：EP1665371A1
公开(公告)日：2006-06-07
申请号：EP04762735.1
申请日：2004-09-03
发明人： HELNEDER, Johann , SCHWERD, Markus , GOEBEL, Thomas , MITCHELL, Andrea , KOERNER, Heinrich , HOMMEL, Martina
IPC分类号： H01L21/768 , H01L23/532
CPC分类号： H01L23/53238 , C23C14/22 , C23C16/44 , H01L21/76834 , H01L21/76888 , H01L23/5228 , H01L23/53223 , H01L2924/0002 , H01L2924/00
摘要： The invention relates to a method for producing a multifunctional dielectric layer on a substrate, especially on an exposed metallic strip conductor system on a substrate. The aim of the invention is to provide a method for producing a multifunctional passivation layer for copper strip conductors that is easy to carry out and that provides improved electromigration, stress migration and improved adhesion. According to the invention, this aim is achieved by depositing an additional metal layer (5) across the surface of the exposed metal strip conductors (3). Said metal layer is then at least partially converted to a nonconducting metal oxide, the dielectric layer.
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