发明公开
EP1701378A2 Method of assembling substrate transfer device and a substrate transfer system unit
有权
Eine Substrattransfervorrichtung
- 专利标题： Method of assembling substrate transfer device and a substrate transfer system unit
- 专利标题（中）： Eine Substrattransfervorrichtung
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申请号： EP06251194.4申请日： 2006-03-07
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公开(公告)号： EP1701378A2公开(公告)日： 2006-09-13
- 发明人: Hashimoto, Yasuhiko
- 申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
- 申请人地址： 1-1 Higashikawasaki-cho 3-chome Chuo-ku, Kobe-shi, Hyogo-ken JP
- 专利权人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
- 当前专利权人： KAWASAKI JUKOGYO KABUSHIKI KAISHA
- 当前专利权人地址： 1-1 Higashikawasaki-cho 3-chome Chuo-ku, Kobe-shi, Hyogo-ken JP
- 代理机构： Charlton, Peter John
- 优先权： JP2005062827 20050307
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; B65G49/07
摘要：
An assembly method of assembling a substrate transfer device including: a transfer system unit forming step of fixing a robot and a substrate container retainer to a divided body which composes a part of the substrate transfer device and is formed separably on a main structural body as a residual part of the substrate transfer device, thereby forming a transfer system unit; an operation examination step of examining whether the robot fixed to the transfer system unit can operate as a part of the substrate transfer device or not; and a mounting step of mounting the transfer system unit on the main structural body of the substrate transfer device after the operation examination step.
公开/授权文献
- EP1701378B1 A substrate transfer system unit 公开/授权日：2011-04-27
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