-
公开(公告)号：EP1868237B1
公开(公告)日：2014-03-19
申请号：EP07252358.2
申请日：2007-06-11
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67766 , H01L21/67775
-
2.发明公开
公开(公告)号：EP1868237A2
公开(公告)日：2007-12-19
申请号：EP07252358.2
申请日：2007-06-11
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67766 , H01L21/67775
摘要： In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.
摘要翻译： 在本发明中，机器人27的基座43固定在框架分割体50的固定部53上。底座43允许从机器人主体27A施加的力传递到分割的框架的固定部53上 相反，框架分割体50的固定部分53具有能够防止从机器人27的基座43施加的力传递到主体构成构件51的刚性。因此，机器人的基座43 27仅具有连接机器人主体27A和框架分割体50的功能。因此，即使降低刚性，也可以防止向晶片加工装置的振动传递，以及基板的故障发生 可以防止加工工作。 此外，通过更简单的构造可以更容易地实现框架分割体50的刚性的提高，并且比增加机器人的刚性更有效。 因此，可以提供更加牢固的晶片处理。
-
公开(公告)号：EP1147863A2
公开(公告)日：2001-10-24
申请号：EP01303547.2
申请日：2001-04-19
发明人： Hashimoto, Yasuhiko , Ohtani, Masami, Dainippon Screen MFG.Co. Ltd , Nishimura, Joichi, Dainippon Screen MFG.Co. Ltd
CPC分类号： B25J18/025 , F16M11/08 , F16M11/18 , F16M11/2014 , F16M11/28 , Y10S414/135 , Y10T74/18848 , Y10T74/20323
摘要： Provided is a robot comprising a telescopic-drive mechanism which does not contaminate works in a purified environment such as a clean room, is easy to handle, and requires no cover for covering the telescopic-drive mechanism. A robot comprises: an up-down axis in which a plurality of hollow axis sectional elements telescopically continue; and a telescopic-drive mechanism for driving the up-down axis to be vertically extended or retracted between an extended state in which a tip end of the up-down axis extends with respect to a base end thereof and a retracted state in which the tip end is moved close to the base end, wherein the telescopic-drive mechanism is integrated on one side of the up-down axis without being exposed from the up-down axis.
摘要翻译： 本发明提供一种机器人，其包括不污染洁净室等净化环境中的工作的伸缩驱动机构，易于处理，不需要覆盖伸缩驱动机构的盖。 机器人包括：上下轴线，多个中空轴线截面元件可伸缩地延伸; 以及伸缩驱动机构，用于驱动所述上下轴线在上下轴线的前端相对于其基端部延伸的伸出状态和所述顶端 端部移动靠近基端，其中伸缩驱动机构集成在上下轴线的一侧而不会暴露于上下轴线。
-
公开(公告)号：EP1868237A3
公开(公告)日：2010-01-27
申请号：EP07252358.2
申请日：2007-06-11
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67766 , H01L21/67775
摘要： In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.
-
公开(公告)号：EP2045049A3
公开(公告)日：2009-05-06
申请号：EP08165581.3
申请日：2008-10-01
CPC分类号： H01L21/67778 , B25J9/1692 , G05B2219/37411 , G05B2219/39013 , G05B2219/39041 , G05B2219/39413 , H01L21/67259 , H01L21/67766 , H01L21/68
摘要： A target position detection apparatus for a robot includes : a robot including an arm configured to be freely moved in at least two directions of X and Y axes, the arm having a wrist axis provided at a distal end of the arm and configured to be freely moved in a horizontal direction, and the wrist axis being provided with an end effector; and a control unit adapted for driving a memory to store a teaching point therein and controlling an operation of the robot such that the end effector will be moved toward the teaching point stored in the memory. The control unit is further adapted for changing a pressing force of the end effector against a target by changing a control loop gain, and bringing the end effector into contact with the target, while setting the control loop gain of the wrist axis lower than a predetermined value at least from a position adjacent to the teaching point at which the target is located, so as to capture a position in a state in which the end effector is in contact with the target, thereby detecting the position of the target.
-
6.发明公开
公开(公告)号：EP1892755A2
公开(公告)日：2008-02-27
申请号：EP07114942.1
申请日：2007-08-24
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , Y10S414/139
摘要： In this invention, a movable body movable in forward and backward directions and a connector fixed to an opener-side door are connected with each other by link members so as to constitute a parallel link mechanism, such that they can be angularly displaced relative to each other. Link member angular displacement means controls the angular displacement of each link member relative to the movable body to be in a predetermined angular position, corresponding to the position of the movable body along the forward and backward directions. Reciprocation of the movable body in the forward and backward directions by movable body drive means moves the opener-side door in the forward and backward directions as well as in the upward and downward directions, thereby opening an opener-side opening. Since the movable body is moved only in the forward and backward directions, and necessity of moving and guiding the movable body in the upward and downward directions can be eliminated, the substrate container opener can be downsized, and a space provided below a FOUP supporting portion can be utilized effectively.
摘要翻译： 在本发明中，在前后方向上可移动的移动体和固定在开启器侧门上的连接器通过连杆构件彼此连接，从而构成平行连杆机构，使得它们能够相对于每个连杆机构 其他。 连杆构件角位移装置将各连杆构件相对于可动体的角位移控制在与可动体沿前后方向的位置对应的预定角位置。 利用可动体驱动装置使可动体在前后方向上往复运动，使开启器侧门沿前后方向以及向上和向下方向移动，由此打开开启器侧开口。 由于可移动体仅在前后方向上移动，并且可以消除在上下方向上移动和引导移动体的必要性，所以可以使基板容器开启器小型化，并且设置在FOUP支撑部分下方的空间 可以有效利用。
-
公开(公告)号：EP1103354B1
公开(公告)日：2003-08-13
申请号：EP00126011.6
申请日：2000-11-28
发明人： Kawamatsu, Yasuo, Dainippon Screen Mfg. Co., Ltd. , Watanabe, Yoshihiko, Dainippon Screen Mfg. Co. Ltd , Hashimoto, Yasuhiko
CPC分类号： H01L21/6835 , B25J19/025 , H01L21/681 , H01L21/68707 , H01L2924/3025
-
公开(公告)号：EP1701378B1
公开(公告)日：2011-04-27
申请号：EP06251194.4
申请日：2006-03-07
发明人： Hashimoto, Yasuhiko
IPC分类号： H01L21/677 , B65G49/07
CPC分类号： H01L21/67778 , H01L21/67775 , Y10S414/137
-
9.发明公开Method of assembling substrate transfer device and a substrate transfer system unit 有权组装的基板输送装置的方法和衬底转移装置
公开(公告)号：EP1701378A3
公开(公告)日：2006-11-08
申请号：EP06251194.4
申请日：2006-03-07
发明人： Hashimoto, Yasuhiko
IPC分类号： H01L21/677 , B65G49/07
CPC分类号： H01L21/67778 , H01L21/67775 , Y10S414/137
摘要： An assembly method of assembling a substrate transfer device including: a transfer system unit forming step of fixing a robot and a substrate container retainer to a divided body which composes a part of the substrate transfer device and is formed separably on a main structural body as a residual part of the substrate transfer device, thereby forming a transfer system unit; an operation examination step of examining whether the robot fixed to the transfer system unit can operate as a part of the substrate transfer device or not; and a mounting step of mounting the transfer system unit on the main structural body of the substrate transfer device after the operation examination step.
-
10.发明公开Method of assembling substrate transfer device and a substrate transfer system unit 有权Eine Substrattransfervorrichtung
公开(公告)号：EP1701378A2
公开(公告)日：2006-09-13
申请号：EP06251194.4
申请日：2006-03-07
发明人： Hashimoto, Yasuhiko
IPC分类号： H01L21/677 , B65G49/07
CPC分类号： H01L21/67778 , H01L21/67775 , Y10S414/137
摘要： An assembly method of assembling a substrate transfer device including: a transfer system unit forming step of fixing a robot and a substrate container retainer to a divided body which composes a part of the substrate transfer device and is formed separably on a main structural body as a residual part of the substrate transfer device, thereby forming a transfer system unit; an operation examination step of examining whether the robot fixed to the transfer system unit can operate as a part of the substrate transfer device or not; and a mounting step of mounting the transfer system unit on the main structural body of the substrate transfer device after the operation examination step.
摘要翻译： 一种组装基板输送装置的组装方法，包括：传送系统单元形成步骤，将机器人和基板容器保持器固定到构成基板传送装置的一部分的分割体上，并且可分离地形成在主结构体上，作为 残留部分的基板转印装置，由此形成转印系统单元; 检查固定到转印系统单元的机器人是否可以作为基板转印装置的一部分进行操作的操作检查步骤; 以及在操作检查步骤之后将传送系统单元安装在基板传送装置的主结构体上的安装步骤。
-
-
-
-
-
-
-
-
-
搜索结果
23 条记录 (耗时 0.017 秒)
