发明授权
EP1711550B1 ADAMANTYL MONOMERS AND POLYMERS FOR LOW-K-DIELECTRIC APPLICATIONS
有权
ADAMANTYLMONOMERE和低K电介质应用的聚合物
- 专利标题: ADAMANTYL MONOMERS AND POLYMERS FOR LOW-K-DIELECTRIC APPLICATIONS
- 专利标题(中): ADAMANTYLMONOMERE和低K电介质应用的聚合物
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申请号: EP04805194.0申请日: 2004-12-23
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公开(公告)号: EP1711550B1公开(公告)日: 2010-12-01
- 发明人: PAULASAARI, Jyri , RANTALA, Juha
- 申请人: Silecs OY
- 申请人地址: Tietotie 3 02150 Espoo FI
- 专利权人: Silecs OY
- 当前专利权人: Silecs OY
- 当前专利权人地址: Tietotie 3 02150 Espoo FI
- 代理机构: Sundman, Patrik Christoffer
- 优先权: US531659P 20031223
- 国际公布: WO2005061587 20050707
- 主分类号: C08G77/02
- IPC分类号: C08G77/02 ; C08G77/20 ; C09D183/04 ; H01L21/31 ; C07F7/18 ; C01B33/12 ; C07C53/138 ; C07C57/28
摘要:
The invention concerns novel silane compounds, which include an adamantyl residue linked to a silicon atom either directly by a carbon-to-silicon bond or, alternatively, via a bridging group, such as an alkylene group. The novel compounds contain at least one hydrolysable group linked to the silicon atom so as to provide for the polymerization of the compounds, e.g. for producing polymers useful as low-k materials.
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