发明授权
EP1711550B1 ADAMANTYL MONOMERS AND POLYMERS FOR LOW-K-DIELECTRIC APPLICATIONS 有权
ADAMANTYLMONOMERE和低K电介质应用的聚合物

ADAMANTYL MONOMERS AND POLYMERS FOR LOW-K-DIELECTRIC APPLICATIONS
摘要:
The invention concerns novel silane compounds, which include an adamantyl residue linked to a silicon atom either directly by a carbon-to-silicon bond or, alternatively, via a bridging group, such as an alkylene group. The novel compounds contain at least one hydrolysable group linked to the silicon atom so as to provide for the polymerization of the compounds, e.g. for producing polymers useful as low-k materials.
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