发明公开
- 专利标题: Mems switch and manufacturing method thereof
- 专利标题(中): MEMS Schalter und Herstellungsverfahren
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申请号: EP06253784.0申请日: 2006-07-19
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公开(公告)号: EP1748457A1公开(公告)日: 2007-01-31
- 发明人: Jeong, Hee-moon , Kwon, Sang-wook , Kim, Che-heung , Kim, Jong-seok , Kim, Jun-o, 705-604 Manhyeon-maeul , Hong, Young-tack , Song-In-sang , Lee, Sang-hun
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: 416 Maetan-Dong, Yeongtong-gu Suwon-si Gyeonggi-do KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: 416 Maetan-Dong, Yeongtong-gu Suwon-si Gyeonggi-do KR
- 代理机构: Ertl, Nicholas Justin
- 优先权: KR20050067333 20050725
- 主分类号: H01H59/00
- IPC分类号: H01H59/00
摘要:
A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.
公开/授权文献
- EP1748457B1 Mems switch and manufacturing method thereof 公开/授权日:2010-06-23
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