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    Mems switch and manufacturing method thereof
    1.
    发明公开
    Mems switch and manufacturing method thereof 有权
    MEMS Schalter und Herstellungsverfahren

    公开(公告)号：EP1748457A1

    公开(公告)日：2007-01-31

    申请号：EP06253784.0

    申请日：2006-07-19

    申请人： Samsung Electronics Co., Ltd.

    发明人： Jeong, Hee-moon ,  Kwon, Sang-wook ,  Kim, Che-heung ,  Kim, Jong-seok ,  Kim, Jun-o, 705-604 Manhyeon-maeul ,  Hong, Young-tack ,  Song-In-sang ,  Lee, Sang-hun

    IPC分类号： H01H59/00

    CPC分类号： H01H59/0009 ,  H01H2059/0054

    摘要： A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

    摘要翻译： 一种MEMS开关，包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接，以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件，用于附接到 或与开关接触部分分离。 至少一个枢轴凸起形成在可动电极的底表面或基板的顶部上。