发明公开
- 专利标题： Cluster tool for microscopic processing of samples
- 专利标题（中）： 样品的显微治疗复合工具
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申请号： EP06121304.7申请日： 2006-09-27
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公开(公告)号： EP1770751A3公开(公告)日： 2011-08-17
- 发明人: Buijsse, Bart , Meuwese, Mark , Bormans, Bernardus , Slingerland, Hendrik , Tappel, Hendrik
- 申请人： FEI COMPANY
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 专利权人： FEI COMPANY
- 当前专利权人： FEI COMPANY
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 代理机构： Bakker, Hendrik
- 优先权： US237475 20050928
- 主分类号： H01J37/20
- IPC分类号： H01J37/20 ; H01J37/28
摘要：
A cluster tool includes multiple tools (104) for microscopic processing of a sample positioned around a rotatable base (102). A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.
公开/授权文献
- EP1770751B1 Cluster tool for microscopic processing of samples 公开/授权日：2015-11-18
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