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    Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus
    3.
    发明公开
    Stage assembly, particle-optical apparatus comprising such a stage assembly, and method of treating a sample in such an apparatus 有权
    级装置，具有用于在这样的设备中处理的样品这样的装置和方法粒子光学设备

    公开(公告)号：EP1780765A2

    公开(公告)日：2007-05-02

    申请号：EP06123224.5

    申请日：2006-10-31

    申请人： FEI COMPANY

    发明人： Tappel, Hendrik ,  Hees. van, Ian ,  Lankers, Danny ,  Giannuzzi, Lucille ,  Veen, van, Gerard ,  Young, Richard

    IPC分类号： H01J37/20 ,  H01L21/68 ,  H01J37/30

    CPC分类号： H01L21/68 ,  G01R31/2898 ,  H01J37/20 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20242 ,  H01L21/68764

    摘要： A particle-optical apparatus comprising:
    - A first source, for generating a first irradiating beam along a first axis;
    - A second source, for generating a second irradiating beam along a second axis that intersects the first axis at a beam intersection point, the first and second axes defining a beam plane,
    - A stage assembly for positioning a sample in the vicinity of the beam intersection point, provided with:

    - A sample table to which the sample can be mounted;
    - A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point,

    wherein the set of actuators is further arranged to effect:
    - rotation of the sample table about a rotation axis substantially parallel to the Z-axis, and;
    - rotation of the sample table about a flip axis substantially perpendicular to the Z-axis,

    whereby the flip axis can itself be rotated about the rotation axis.

    摘要翻译： 甲粒子光学设备，包括： - 第一源，用于产生沿着第一轴的第一照射束; - 第二源，用于沿第二轴线产生第二照射束确实相交的第一轴线在束交叉点，所述第一和第二轴线限定一个光束平面上， - 为在附近定位样品A级组件（3） 光束交点，设置有： - 以可安装样品的样品台; - 一组致动器，布置成实现所述试样台的平移沿着方向基本上平行于在X轴垂直于光束平面，平行于束平面的Y轴，和平行Z轴的光束 规划所述X轴，Y轴和Z轴相互正交，并穿过分束交点，worin该组致动器进一步被布置成作用： - 样品台的旋转绕旋转轴线基本上平行于 Z轴，和; - 约倒装轴用的试样台大致垂直于所述Z轴，由此翻转轴线本身可以绕旋转轴线旋转。